Lhe/LN2 Cooled Probe Stationsst-500 Series

Micro-manipulatedCryogenic & Vacuum Probe Systems
for Chips, Wafers and Device Testing
from ~3 K to 475 K

LHe/LN2 Cooled Probe StationsST-500 Series

The Janis ST-500 series probe stations are high performance research instruments designed to provide affordable vacuum and cryogenic probing of wafers and devices. The proven ST-500 cryostat is the platform for these probe stations, and includes low vibration technology (originally designed for high spatial resolution optical microscopy) to provide outstanding sample positional stability. Researchers around the world are using these systems to conduct research in a wide variety of fields, including MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences, and optics.

Variable Temperature Cryostat

A cryostat is at the center of every cryogenic probe station, and Janis has been a world leader in the design and manufacture of research cryostats for over forty-five years. The ST-500 cryostat provides a mechanism for cooling samples efficiently and effectively. The sample is mounted on a removable sample chuck (holder); sample chucks are available in a variety of configurations including grounded, coaxial, and triaxial. The sample is fully surrounded by a thermal shield to minimize radiant sample heating, resulting in the lowest possible sample temperature. A high efficiency transfer line is used to provide sample cooling using either LHe or LN2, and includes an integrated adjustable cryogen flow control valve. Two silicon diode thermometers and a high wattage heater are used to regulate and monitor the sample temperature within the broad operating temperature range of 3 K – 475 K. Optional optical access through the cryostat bottom flange makes transmission experiments possible.

Standard Equipment

• Low vibration model ST-500 cryostat with integrated vacuum chamber, sample mount, and cooled radiation shield.
• High efficiency LHe/LN2 transfer line with needle valve flow control.
• Two silicon diode thermometers, installed at the control heat exchanger and at the sample mount.
• Cartridge heater for temperature control.
• Cooled radiation shield window.
• Four integrated X-Y-Z probe station stages with probe support arms, cooled probe holders and LF or MW probes.
• Four edge welded metal bellows to permit probe translation.
• 10-pin electrical feedthrough.

Optional Equipment

• Monoscope with fiber-optic light source, vertical boom stand with vertical and horizontal adjustment, CCD camera, LCD color monitor. Available models include zoom of 7:1, 12.5:1, 16:1.
• Cryogenic temperature controllers from the leading controller suppliers. Each controller supplied by Janis includes full integration and testing with the system.
• Turbopump station including 52 L/s turbomolecular pump, wide range vacuum gauge and readout, stainless steel flexible pumping line. Available with mechanical or dry diaphragm backing pump.
• Vibration isolation table, 30” x 30” work surface secured to black anodized frame utilizing pneumatic isolators.
• Portable ultra-quiet air compressor for vibration isolation table.
• LN-50 liquid nitrogen storage dewar, with adapter to match the Janis high efficiency transfer line.

* 50 mm including Y-stage pivot.

液氦/液氮制冷型探针台：ST-500系列探针台

Janis ST－500系列探针台是高性能研究仪器，为晶片和器件提供便宜的真空和低温探测，使用的减振动技术保证了样品位置的稳定。世界各国的研究人员使用这些设备进行很多领域的研究，包括MEMS，纳米电子学、超导、铁电电子学、材料科学和光学等。

制冷机是每个低温探针台的核心，Janis有四十多年的设计和制造低温制冷机的经验，是该领域世界领导者。ST-500制冷机提供了能高效地制冷样品的机制。样品安放在一个可以拆卸的样品卡盘（支架）上，样品卡盘可以是各种形状，包括接地型、同轴型或三轴型。样品周围是绝热罩，尽量减小辐射对样品的影响，从而使样品的温度尽可能最低，使用高效液氦或液氮制冷剂传输线制冷样品，包括一个集成可调制冷剂流量控制阀，两个硅二极管温度计和一个高瓦数加热器用来在3K－475K的大温度范围内调节和监控样品的温度，制冷机底部法兰可选光学窗口进行光学实验。

标准配置：

低振动ST-500型制冷剂、真空腔、样品支架、低温防辐射罩

带针孔流量控制阀的高效液氦/液氮传输线

分别安装在控制热交换器和样品支架上的两个硅二极管温度计

用来控温的筒式加热器

低温防辐射窗口

带有探针支架臂、低温探针支架和低频或中频探针的四个集成X-Y-Z 探针台

四个边焊波纹管可以使探针转动

10针电子电子feedthrough.

可选购配置

带光纤光源的单像管, 可水平和垂直调节的下桁架, CCD照相机, LCD彩色监控器，可放大倍数有7:1,12.5:1,16:1；

国际领先的控制器供应商提供制冷机温度控制器；

涡轮泵站包括一个52 L/s的涡轮分子泵，宽量程真空硅和读出电路，不锈钢软管线,可使用机械泵或膜片泵作为前级泵；

防振台，利用空气弹簧隔振体和黑色电镀支架固定的30” x 30”工作平面；

为防振台配备的便携式超静音空气压缩机；

存储50升液氮杜瓦以及高效传输线；