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SEMI Draft Document 4538
REVISION OF SEMI F105-1107
GUIDE FOR METALLIC MATERIAL COMPATIBILITY IN GAS DISTRIBUTION SYSTEMS
Background Information
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
The ballot proposes to add alloy KM38® to F105-1107 - Guide for Metallic Material and Gas Compatibility in Gas Delivery Systems, requested by Dan Mudd.
KM38® is a Japanese ferritic stainless steel similar to KM45®. It has a history of successful use in some gas system components.
This letter ballot will be reviewed by the Materials of Construction of Gas Delivery Systems Task Force and adjudicated by the Gases Committee at their meetings in Dallas, TX, during the week of 7 April, 2008.
Note: Additions are indicated by underline and deletions are indicated by strikethrough.
SEMI Draft Document 4538
REVISION OF SEMI F105-1107, GUIDE FOR METALLIC MATERIAL COMPATIBILITY IN GAS DISTRIBUTION SYSTEMS
1 Purpose
1.1 The purpose of this guide is to document the industry acceptable compatibility of metallic materials with semiconductor process gases.
2 Scope
2.1 This guide is applicable to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment. It is not applicable to high pressure, bulk delivery systems.
2.2 This guide is specific to High Purity and Ultra-High Purity chemical delivery systems.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This guide is only applicable when the process gases have less than 1 ppm water vapor. Higher levels of water vapor in some process gases other than the inert category have been known to cause corrosion in gas delivery systems.
3.2 This guide is only applicable for temperatures less than 60°C. At temperatures above 60°C, corrosion mechanisms such as stress corrosion cracking may occur and more detailed analysis is recommended.
3.3 The compatibility is limited to the gas phase of the chemistries listed. Liquid phase compatibility is not considered in this Guide.
3.4 This guide only addresses the degradation of the metallic materials when exposed to the applicable chemistries. It does not address potential issues associated with catalytic decomposition of gases in the presence of metal alloys. For information on this subject, see the Proceedings of the Institute of Environmental Sciences[1].
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E52 — Practice for Referencing Gas and Gas Mixtures Used in Digital Mass Flow Controllers
SEMI F19 — Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
4.2 ASTM Standard[2]
ASTM F2063 — Standard Specification for Wrought Nickel-Titanium Shape Memory Alloys for Medical Devices and Surgical Implants
4.3 SAE International[3]
HS-1086 — Metals and Alloys in the Unified Numbering System
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 UNS — Unified Numbering System
5.1.2 ppm — parts per million by volume
5.2 Definitions
5.2.1 halides — binary compounds, one part of which is a halogen atom and the other part is an element or a radical that is less electronegative than the halogen.
5.2.2 halogenated hydrocarbons — hydrocarbons with one or more hydrogen atoms substituted by halogen atoms.
5.2.3 halogens — elements in Group 17 (Old style VIIA) of the periodic table, namely, Fluorine, Chlorine, Bromine and Iodine.
5.2.4 hydrocarbons — gases with a chemical structure consisting of only carbon and hydrogen elements. These gases have a carbon backbone and have hydrogen atoms attached to this backbone.
5.2.5 hydrides — compounds of hydrogen with a more electropositive element.
5.2.6 inerts — gases that are not reactive under normal conditions.
5.2.7 oxides — compounds of oxygen with other elements.
6 Metallic Material Compatibility
6.1 Baseline Material — The Ultra High Purity grade material described in SEMI F20 when combined with the Ultra High Purity grade conditioning of the surfaces as described in SEMI F19 is assumed to be compatible with all process gases used in chemical delivery systems for semiconductor manufacturing equipment (within the limitations described in § 3).
6.2 Alternate Materials — Alternate materials other than the Ultra High Purity grade material described by
SEMI F19 and SEMI F20 may be allowed in chemical delivery systems. The materials considered by this Guide are described in Table 1. UNS numbers are used (where possible) to identify the chemical composition and unless otherwise noted, all commercial alloys that comply with the applicable UNS/ASTM specification are considered equivalent. If listed as compatible (see Table 3), these alternative materials are considered to be at least as resistant to reaction as the Ultra High Purity grade material defined in SEMI F19/SEMI F20.
Table 1 Alternative Metallic Materials
Metal Alloy / Alloy Class /S31603 UHP / Austenitic Stainless Steel (SEMI F19/SEMI F20 Ultra High Purity Grade)
S31603 HP / Austenitic Stainless Steel (SEMI F19/SEMI F20 High Purity Grade)
S31603 GP / Austenitic Stainless Steel (SEMI F19/SEMI F20 General Purpose Grade)
S31603 / Austenitic Stainless Steel
S31600 / Austenitic Stainless Steel
N06625 / Nickel Based Alloy
N06600 / Nickel Based Alloy
N07750 / Nickel Based Alloy
N08825 / Nickel Based Alloy
R30003 / Cobalt Based Alloy
R30004 / Cobalt Based Alloy
N06022 / Nickel Based Alloy
N10276 / Nickel Based Alloy
Spron® 100 / Cobalt Based Alloy
Spron® 510 / Cobalt Based Alloy
N02200 / Non-Ferrous Alloy
S31703 / Austenitic Stainless Steel
S31726 / Austenitic Stainless Steel
S32100 / Austenitic Stainless Steel
S31254 / Super Austenitic Stainless Steel
N08367 / Super Austenitic Stainless Steel
N08020 / Super Austenitic Stainless Steel
S32205 / Duplex Stainless Steel
S32750 / Super Duplex Stainless Steel
N07718 / Nickel Based Alloy
S31277 / Super Austenitic Stainless Steel
S30200 / Austenitic Stainless Steel
S30400 / Austenitic Stainless Steel
N04400 / Non-Ferrous Alloy
ASTM F2063 / Shape Memory Alloy
KM38® / Ferritic Stainless Steel
KM45® / Ferritic Stainless Steel
NOTE 1: The UNS number is derived from the SAE International/ASTM book “Metals and Alloys in the Unified Numbering System”.
NOTE 2: The Spron® materials do not have UNS numbers. For detailed information of the chemical composition of these alloys, contact Seiko Instruments Incorporated.
NOTE 3: The KM38 and KM45 materials does not have a UNS number. For detailed information of the chemical composition of theseis alloys, contact Tohoku Steel Company Ltd.
6.3 Process Gases — The process gases were derived from SEMI E52. The categorization is based on expected reaction mechanisms and is not related to safety classifications.
Table 2 Applicable Process Gases by Category
Category / Gases / Formula / SEMI Gas Code /Inerts / Nitrogen / N2 / 13
Argon / Ar / 4
Xenon / Xe / 6
Helium / He / 1
Hydrocarbons/Halogenated Hydrocarbons
Hydrocarbons/Halogenated Hydrocarbons / Methane / CH4 / 28
Ethane / C2H6 / 54
Dichloromethane / CH2CI2 / 265
Difluoromethane / CH2F2 / 160
Methyl Fluoride / CH3F / 33
Dichlorodifluoromethane / CCI2F2 / 84
Carbon Tetrachloride / CCI4 / 101
Carbon Tetrafluoride / CF4 / 63
Hexafluoroethane / C2F6 / 118
Trichlorofluoromethane / CCI3F / 91
Trichlorotrifluoroethane / C2CI3F3 / 126
Trichloromethane / CHCI3 / 71
Trifluoromethane / CHF3 / 49
Hexafluoro-2-butyne / C4F6 / 270
Hexafluorobutadiene-1,3 / C4F6 / 297
Octafluorocyclobutane / C4F8 / 129
Octafluorocyclopentene / C5F8 / 266
Halogens/Halides / Chlorine / CI2 / 19
Bromine / Br2 / 21
Fluorine / F2 / 18
Hydrogen Bromide / HBr / 10
Hydrogen Chloride / HCI / 11
Hydrogen Fluoride / HF / 12
Tungsten Hexafluoride / WF6 / 121
Boron Trichloride / BCI3 / 70
Boron Trifluoride / BF3 / 48
Chlorine Trifluoride / CIF3 / 77
Sulfur Hexafluoride / SF6 / 110
Dichlorosilane / SiH2CI2 / 67
Trichlorosilane / SiHCI3 / 147
Silicon Tetrafluoride / SiF4 / 88
Silicon Tetrachloride / SiCI4 / 108
Phosphorus Trifluoride / PF3 / 62
Nitrogen Trifluoride / NF3 / 53
Halogens/Hydrides / Hydrogen / H2 / 7
Hydrogen Sulfide / H2S / 22
Hydrogen Selenide / H2SE / 23
Arsine / AsH3 / 35
Ammonia / NH3 / 29
Germane / GeH4 / 43
Phosphine / PH3 / 31
Diborane / B2H6 / 58
Pentaborane / B5H9 / 142
Silane / SiH4 / 39
Disilane / Si2H6 / 97
Trimethylsilane / (CH3)3SiH / 190
Methylsilane / CH3SiH3 / 185
Oxygen/Oxides / Oxygen / O2 / 15
Ozone / O3 / 30
Carbon Monoxide / CO / 9
Carbon Dioxide / CO2 / 25
Nitric Oxide / NO / 16
Nitrogen Dioxide / NO2 / 26
Nitrous Oxide / N2O / 27
Sulfur Dioxide / SO2 / 32
6.4 Compatibility Matrix — The metallic materials and their compatibilities are detailed in the Compatibility Matrix (see Table 3).
Table 3 Compatibility Matrix
Metal Alloys / Inerts / Hydrocarbons & Halogenated Hydrocarbons / Halogens & Halides / Hydrogen & Hydrides / Oxygen & Oxides /S31603 UHP / + / + / + / + / +
S31603 HP / + / + / X / + / +
S31603 GP / + / + / X / + / +
S31603 / + / + / X / + / +
S31600 / + / + / X / + / +
N06625 / + / + / + / + / +
N06600 / + / + / X / + / +
N07750 / + / + / X / + / +
N08825 / + / + / + / + / +
R30003 / + / + / + / + / +
R30004 / + / + / + / + / +
N06022 / + / + / + / + / +
N10276 / + / + / + / + / +
Spron® 100 / + / + / + / + / +
Spron® 510 / + / + / + / + / +
N02200 / + / + / + / + / + #3
S31703 / + / + / + / + / +
S31726 / + / + / + / + / +
S32100 / + / + / X / + / +
S31254 / + / + / + / + / +
N08367 / + / + / + / + / +
N08020 / + / + / + / + / +
S32205 / + / + / + / + / +
S32750 / + / + / + / + / +
N07718 / + / + / + / + / +
S31277 / + / + / + / + / +
S30200 / + / + / X / + / +
S30400 / + / + / X / + / +
N04400 / + / + / X / X / X
ASTM F2063 / + / + / + / + / +
KM38® / + / + / X / + / +
KM45® / + / + / X / + / +
#1 "+" represents compatible
#2 "X" represents less compatible than SEMI F19/SEMI F20 Ultra High Purity Grade material
#3 Although Nickel 200 is compatible with most oxides, it can react with carbon monoxide to produce nickel carbonyls. Due to this potential reaction mechanism, Nickel 200 is not recommended for use in carbon monoxide applications. Other high nickel alloys in this table that contain chromium do not have this same problem due to protective layer of chromium oxide.
NOTE 4: Combinations of compatible gases are also considered compatible. Any combination of gases that contains an incompatible gas is considered incompatible.
NOTE 5: Limitations may exist for gases not in the defined gas list (see Table 2). For metallic materials not included in Table 1 or process chemistries not included in Table 2, users must make independent assessments.
RELATED INFORMATION 1
Common and/or Example Designations and Typical Applications
NOTICE: This related information is not an official part of SEMI F105 and was derived from input from available literature. This related information was approved for publication by full letter ballot on September 5, 2007.
R1-1 Common and/or Example Designations and Typical Applications