Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
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Background Statement for SEMI Draft Document 5872
LINE ITEM REVISION TO SEMI E172-1015: Specification for SECS Equipment Data Dictionary (SEDD)
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Background
When creating the first version of the SEMI E172 standard, several features were intentionally postponed. See the SNARF for ballot 5619 for reference. This ballot proposes to add the previously postponed features. The new proposed features intend to make SEDD files even more descriptive of an equipment’s GEM interface implementation.
E173 References
SEMI standards E172 and E173 were originally balloted at the same time as ballots 5619 and 5620, respectively. The simultaneous submission made it impossible for E172 to reference E173 unless E172 was delayed. To avoid delaying the ballot development, ballot 5619 copied sections from ballot 5620schema. This ballot proposes to remove the sections previously copied from E173 and instead imports these features from the E173 schema file which is now published and therefore can be imported.
The E172 Specification includes a Complementary File; a schema file named “E172-1015-SEDD-Schema.xsd”. A new Complementary File is included with this ballot, a schema file named “E172-MMYY-SEDD-Schema.xsd”. It is understood that when the ballot is approved, SEMI staff will rename this file by replacing the “MM” and “YY” with the new E172 month and year, respectively.
IMPORTANT: Note that the full details of the added and deleted items within the Complementary File are not included in the text of this ballot in order to make this ballot easier to understand. The “…” text signified the definition of the added or deleted items. See the attached Complementary File “E172-MMYY-SEDD-Schema.xsd” for details of the added and deleted items.
The E172 Specification includes Various Material file called “SEDD_TrackSys_Model404_2015-01-30”. A new Various Material file SEDD_TrackSys_Model404_MMYY.xml is included with this ballot. It is understood that when the ballot is approved, SEMI staff will rename this file by replacing the “MM” and “YY” with the new E172 month and year, respectively.
Additionally, please note that the “E173-1015-SECSIIMessageNotation-Schema.xsd” file is included in the ballot zip file for convenience, but is not part of the ballot.
Note that text to be added are shown in underlined blue text. Deleted items are shown in strikethrough red text.
What is the problem being solved?
Current E172 SEDD files that comply with E172-1015 document the list of collection events, data variables, status variables, equipment constants, alarms, recipe variables and variable formats. While this is very useful, it fails to document other features of a GEM interface.
This ballot proposes to enhance E172 so that SEDD files are capable of also documenting the list of:
- S2F41/F49 remote commands and the arguments available for each command
- SECS-II messages and the allowed format(s) for each message
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 1Doc. 5872 SEMI
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
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- Standards and the compliance table for each standard.
- Predefined event reports
Instead of maintaining a copy of definitions from the E173 standard, this ballot also proposes referencing E173 and removing the copied definitions. This was the original intent of the E172 and E173 authors.
All of the changes are proposed in a single line item.
What is the history of this issue and ballot?
This is the first submission of this ballot.The topics of this ballot have been discussed previously in the GEM 300 task force on multiple occasions since the original ballot 5619 was introduced.
Who will this affect?How?Why?
. The changes are backward compatible so that SEDD files compatible with the E172-1015-SEDD-Schema.xsd schema file will still be compatible with the new schema file. Anyone using E173-1015 can upgrade to the new E173 whenever they want because new features in the SEDD file are optional. Of course, in order to take advantage of the new features, the new items would need to be added to a SEDD file.
Is this a change to an existing solution, or, is it a new activity?
These are new features to an existing Specification.
Revision Control
This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force.
Date / Version / Name / EditsMay 10, 2016 / 1.0 / Brian Rubow / Final draft of this ballot
Review and Adjudication Information
Task Force Review / Committee AdjudicationGroup: / NA GEM300 TF / NA Information & Control Committee
Date: / Tuesday, July 12 / Wednesday, July 13
Time & Timezone: / 1:00 PM – 3:30 PM / 8:00 AM – 4:30 PM
Location: / Marriott Marquis Hotel / Marriott Marquis Hotel
City, State/Country: / San Francisco, CA/USA / San Francisco, CA/USA
Leader(s): / Brian Rubow (Cimetrix)
Gino Crispieri (Consultant) / Jack Ghiselli (Ghiselli Consulting)
Brian Rubow (Cimetrix)
Standards Staff: / James Amano (SEMI NA)
1.408.943.7977 / / James Amano (SEMI NA)
1.408.943.7977 /
Meeting details are subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.
SEMI Draft Document 5872
LINE ITEM REVISION TO SEMI E172-1015: Specification for SECS Equipment Data Dictionary (SEDD)
Note: Per ¶ 3.4.3.3.1 of the SEMI Standards Procedure Guide, the introductory sections of SEMI E172-1015are provided below.
1 Purpose
1.1 The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment. This is a type of documentation, called the SECS Equipment Data Dictionary (SEDD). It is primarily intended as a means for an equipment supplier to provide such documentation to its customers. The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment.
1.2 This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation. This is a supplement to that documentation.
2 Scope
2.1 The SEDD is intended to be a data set that documents key elements of a SECS-II interface. The form in which this data is provided is intended to be comprehensible to both humans and software applications.
NOTICE:SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 The potential set of information that could be communicated about a SECS-II interface is large. This Specification addresses an important subset of that information. The customer of the production equipment may need additional information about the SECS-II interface to be provided in the traditional paper (or equivalent) format.
4 Referenced Standards and Documents
4.1 SEMI Standards and SafetyGuidelines
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E90 — Specification for Substrate Tracking
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E164 — Specification for EDA Common Metadata
4.2 W3CStandards[1]
Extensible Markup Language (XML) 1.1 (Second Edition) – W3C Recommendation 16 August 2006;
XML Schema Definition Language (XSD) 1.1 Part 1: Structures – W3C Recommendation 5 April 2012
XML Schema Definition Language (XSD) 1.1 Part 2: Datatypes – W3C Recommendation 5 April 2012
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations andAcronyms
5.1.1 RVP — Recipe Variable Parameter
5.1.2 SECS — SEMI Equipment Communications Standard
5.1.3 SECS-II — SEMI Equipment Communications Standard 2
5.1.4 SEDD — SECS Equipment Data Dictionary
5.1.5 W3C — Worldwide Web Consortium
5.1.6 XML —eXtensible markup language
5.2 Definitions
5.2.1 bit field — a simple data structure used to store multiple bits, where each bit has a separate logical meaning. Each bit is limited to the values 1 for ‘on’ and 0 for ‘off’. Individual bits are sometimes referred to as ‘flags’.
5.2.1.1 Discussion — SECS-II does not support bit field data types, but bit fields can be represented by any of the supported data types, such as unsigned integers or binary data.
5.2.2 collection event— an event that may be used to initiate the collection and reporting of data. A collection event may trigger an event report. A collection event also may start or stop one or more trace reports. [SEMI E53]
5.2.3 equipment recipe— an executable specification of an activity or process on an equipment. The recipe is the user-managed, reusable portion of the set of instructions and settings that determine the processing environment seen by the material. Recipes may be subject to change between runs or processing cycles. An equipment recipe consists of one or more recipe components. [SEMI E157]
5.2.4 eXtensible markup language (XML)— a markup language used for representing data rich with context and content in documents and in communications. XML is an extension of SGML, a document-oriented markup language. It was created by W3C for use on the Internet. XML can represent object-oriented structures. [SEMI E120.1]
5.2.5 host— the factory computer system or an intermediate system that represents the factory and the user to the equipment. [SEMI E87]
5.2.6 process job— a material processing job for a processing resource specifying and tracking the processing to be applied to the material. [SEMI E40]
5.2.7 production equipment— equipment used to produce semiconductor devices, including sorting, process, and metrology equipment and excluding material handling and storage equipment. [SEMI E168]
5.2.8 recipe component— an executable specification that is managed by the equipment as a separate entity (e.g., file). A recipe component represents all or part of an equipment recipe. For a multipart recipe, a recipe component may be referred to as a subrecipe. A recipe component may contain zero or more recipe steps. [SEMI E157]
5.2.9 recipe variable parameter (RVP)— a setting contained in a recipe component whose value can be adjusted by the host for an execution of that recipe without making a permanent change to the recipe.
5.2.9.1 Discussion— An RVP can be set using features of SEMI E40 for process job management. SEMI E30 specifies that it can also be set by remote commands from the host. SEMI E30 uses the term ‘variable parameter’ – see ‘variable parameter settings’ and CPNAME/CPVAL in SEMI E30, §4.4. In this Specification, the terms are equivalent.
5.2.10 subordinate recipe — a subsidiary component of a multipart recipe. A subordinate recipe is typically executed based upon a command or setting in another equipment recipe.
5.2.11 variable parameter — a formally defined variable (setting) defined in the body of a recipe, permitting the actual value to be supplied externally. [SEMI E139]
5.2.12 SECS Equipment Data Dictionary (SEDD)—a data set, formatted as an XML file, that contains definitions of key elements of a production equipment’s SECS-II interface. This may include such elements as collection events, variables, and alarms.
1 Changes to the SEMI E172 Specification
NOTE to SEMI Staff: All references to “E172-1015-SEDD-Schema.xsd” in the E172 specification are to be updated to match the new Complementary File name which is not known until the time of publication. There are multiple such references.
1.1 Proposal
In the SEMI E172 Specification, section 4.1 SEMI Standards and Safety Guidelines, add the following additional reference:
SEMI E173 — Specification for XML SECS-II Message Notation (SMN)
1.2 Proposal
In SEMI E172 Specification, section 5.1, add the following abbreviation:
5.1.7 SMN — SECS-II Message Notation [SEMI E173]
1.3 Proposal
In the SEMI E172 Specification, replace the image in Figure 1 SEDD Schemain section 7.5.1 (“Figure from E172-1015“) with the new image shown below it (“Proposed Figure 1“), which includes the new (optional) elements.
Figure 1 from E172-1015
Proposed Figure 1
1.4 Proposal
In the SEMI E172 Specification, section 9.3.1 add the following text. Note that the actual MM and YY values are not known until the time of publication.
9.3.1 The Complementary File ‘E172-1015MMYY-SEDD-Schema.xsd’ is a part of this Specification. It is an XML schema file. It is referred to in this Specification as the ‘SEDD schema’. Note that the SEDD schema imports Complementary File ‘E173-1015-SECSIIMessageNotation-Schema.xsd’ from the E173 Specification which is hereafter referred to as the ‘SMN schema’.
[E172.00-RQ-00004-00] Each SEDD shall be defined in accordance with all requirements in this Specification including those in the XML schema ‘E172-1015MMYY-SEDD-Schema.xsd’ that is a Complementary File to this Specification. [/RQ]
1.5 Proposal
In the SEMI E172 Specification, section 9.5.43.1 modify the following text as follows and remove Table 6.
9.5.4.3.1 The SEDDSMNschema specifies ‘ASC’ to represent an ASCII string and ‘LST’ to represent a SECS-II list.Please refer to the E173 Specification for a complete listing of the SECSData notation used for the various SECS-II formats. Table 6 lists all of the formats that can be used for the data items in a SECSData element of the VariableFormat structure, as specified in the SEDD schema. Using lists (LSTs), these formats can be built into complex data structures.
Table 6 SECSData Data Item Formats
Format Name / SECS-II Format Code (Octal) / MeaningLST / 00 / LIST (length in elements)
BIN / 10 / Binary
BOO / 11 / Boolean
ASC / 20 / ASCII
JIS / 21 / JIS-8
MBC / 22 / 2 byte character
SI8 / 30 / 8 byte integer (signed)
SI1 / 31 / 1 byte integer (signed)
SI2 / 32 / 2 byte integer (signed)
SI4 / 34 / 4 byte integer (signed)
FP8 / 40 / 8 byte floating point
FP4 / 44 / 4 byte floating point
UI8 / 50 / 8 byte integer (unsigned)
UI1 / 51 / 1 byte integer (unsigned)
UI2 / 52 / 2 byte integer (unsigned)
UI4 / 54 / 4 byte integer (unsigned)
ANY / Any / Can take any format as needed
SET / As specified / The list of allowable format codes is specified
SIA / 30, 31, 32, or 34 / Any signed integer format
UIA / 50, 51, 52, or 54 / Any unsigned integer format
INT / 30, 31, 32, 34,
50, 51, 52, or 54 / Any integer format
FPA / 40 or 44 / Any floating point format
1.6 Proposal
In the SEMI E172 Specification, update the name of the Various Materials file. Note that the actual MM and YY values are not known until the time of publication.
9.7.2.1 The file is named ‘SEDD_TrackSys_Model404_2015-01-30MMYY.xml’.
1.7 Proposal
In the SEMI E172 Specification, add the following new subsections to section 9.5 SEDD Content.
9.5.9 SECS-II Messages
9.5.9.1 The SECSMessages section lists supported SECS-II messages and the allowed format for each message. Note that the schema allows more than one message body definition for a single message.
9.5.9.2 The complete specification is included in the SEDD schema.
9.5.9.3 Consult the Appendix the E173 SMN Specification for examples of messages formatted using SMN.
9.5.10 Remote Commands
9.5.10.1 The RemoteCommands section lists supported GEM remote commands, if any. When no GEM remote commands are supported, then this section may be omitted.
9.5.10.2 The complete specification is included in the SEDD schema.
9.5.11 SEMI Standards
9.5.11.1 The SEMIStandards section lists supported SEMI standards and includes a compliance statement for each.
9.5.11.2 The complete specification is included in the SEDD schema.
9.5.12 Default Reports and Default Event Reports
9.5.12.1 The DefaultReports section lists reported that are predefined by the equipment.
9.5.12.2 The DefaultEventReports section lists reports that are linked to events by the equipment.
9.5.12.3 The complete specification is included in the SEDD schema.
2 Changes to the E172 Complementary File
2.1 Proposal
In the SEMI E172 Complementary File, add the following import statement to the E172ComplementaryFile, as seen in the proposed Complementary File “E172-MMYY-SEDD-Schema.xsd”. This import statement causes the E172 Complementary File to reference the E173 Complementary File.
<xs:import schemaLocation="E173-1015-SECSIIMessageNotation-Schema.xsd" namespace="urn:semi-org:xsd.SMN"</xs:import>
2.2 Proposal
In the SEMI E172 Complementary File, delete complex type DataItem, attribute group DataItemAttributes, complex type DataItemBase and simple type SECSItemFormat from the E172 ComplementaryFile, as seen in the proposed Complementary File “E172-MMYY-SEDD-Schema.xsd”. These items are found in the now imported E173 Complementary file “E173-1015-SECSIIMessageNotation-Schema.xsd”.
<xs:complexType name="DataItem">
…
</xs:complexType>
<xs:attributeGroup name="DataItemAttributes">
…
</xs:attributeGroup>
<xs:complexType name="DataItemBase">
…
</xs:complexType>
<xs:simpleType name="SECSItemFormat">
…
</xs:simpleType>
2.3 Proposal
In the SEMI E172 Complementary File, add elementSECSMessages and simple type SEMIStandardType to the E172ComplementaryFile as part of the DataDictionary sequence, as seen in the proposed Complementary File “E172-MMYY-SEDD-Schema.xsd”.
<xs:element name="SECSMessages" minOccurs="0"
…
</xs:element>
<xs:simpleType name="SEMIStandardType">
<xs:restriction base="xs:string">
<xs:pattern value="([A-Z]{1,3}[0-9]{1,3}-((0[1-9])|(1[0-2]))[0-9][0-9])"/>
</xs:restriction</xs:simpleType>
2.4 Proposal
In the SEMI E172 Complementary File, modify the definitions element SEMIStandard for elements CollectionEvent, DataVariable, StatusVariable, EquipmentConstant, and Alarm to use the simple type.
<xs:element name="SEMIStandard" type=”SEMIStandardType” minOccurs="0">
…
<xs:simpleType>
<xs:restriction base="xs:string">
<xs:pattern value="(E[0-9]{1,3}-((0[1-9])|(1[0-2]))[0-9][0-9])"/>
</xs:restriction>
</xs:simpleType>