PFS815-E
UltiKleenG2 Kleen-Change
A High Perfromance Disposable Filter, Extremely High Fllow Rates for High Purity Chemicals
“UltKleenG2 Kleen-Change” assembly is a completely disposable filter unit. It has vastly improved flow characteristics, developed for the process chemicals used in the 300mm Wafer fabrication process. The Ultipleat filter design allows the highest flow capacity as far as 1.5 ㎡ filter areas for the compact filter size, offering the optimum in particle removal ability and an long service life And because the built-in filter cartridges are cleaned by acid before shipment, they ensure the excellent effuluent cleanliness. It’s an ideal upgrade filter for those being used on existing lines.
■ Materials
Component Material
Medium PTFE
Support and drainage New PFA
Core, Cage New PFA
End Cap New PFA
Housing New PFA
■ Specifications
Grade UCFD UCFT UCFR
Removal ratings 0.05μm, 0.1μm, 0.2μm
Configurations T-flow , IN-line , L-flow
Filter Areas 1.5 m²
Maximum Operating Temperature 170 ˚C
Maximum Operating Pressure 0.49MPaG{5.0kgf/cm²}G(@ 50˚C)
0.15MPaG{1.5kgf/cm²}G(@120˚C)
0.12MPaG{1.2kgf/cm²}G(@170˚C)
■ Features
l Optimized Ulti-pleat construction almost doubles filter area compared with our existing products.
l A disposable filter unit with the filter cartridge heat sealed in housing
l Built-in filter cartridge cleaned by acid
■ Advantages
l Flow characteristics vastly improved, further increasing clean-up speeds
l System designs are made easy by the availability of T-flow, In-line and L-flow options
l Reduced line flushing time leads to greater efficiency
UltiKleenG2 Kleen-Change
Code Removal Ratings(μm) Connection Option
3/4” Male Super Type(Nihon Pillar)
3/4” Tube
3/4” Male Super Type (Nihon Pillar)
1” Tube
3/4” Male Flaretek (Nisso Eng.)
Connection Option
Tupe, 20 Seriies(Flowell), Super Type ( Nihon Pillar), Flaretek(Nisso Eng.)
Flow Characterristics (Water @20℃)
Fluid Compatibility
The “UltiKleen Kleen-Chnage” filter is compatible with virtually all process fluids. However, use may be impossible under some operating conditions or with some fluids. If you are unclear whether the filter can be used, please contact our nearest sales office.