Procedural Review Voting Sheet
2014 Cycle 8
REGION: North America
COMMITTEE: Liquid Chemicals
EVENT: North America Standards Spring 2015 Meetings
DATE OF MEETING: March 31, 2015
PLACE OF MEETING: SEMI Headquarters in San Jose, California
COMMITTEE CO-CHAIRS: Frank Flowers/PeroxyChem, Frank Parker/ICL
SEMI STAFF: Michael Tran
A&R Voter: Name/Company
Date: 200X/MM/DD
I. Document Number & Title
Document 5621B / New Standard: Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water SystemII. Tally (Staff to fill in)
Voting Tally: As-cast tally after close of voting period
A minimum of 60% of the voting interests that have voting members within the technical committee must return votes. (Regulations ¶ 9.6.1)
Reason:
III. Rejects
Reject 1 - Hiroshi Sugawara (Organo)
Negative 1 of Reject 1
Negative / Referenced Section / *TF/Committee to fill in if necessaryReason / *Original negative comment and justification should be included.
The rejects at the last ballot are technically persuasive. Please check the rejects and comments again. There is no reason why you are changing this document subtype to a Guide and not a Test Method standard. It is true that the industry is not familiar with the technique (LNS). Although you described that the LNS was used in the referenced method validation test for particle analysis at 10 nm and the previously published SEMI C79 has data verifying the accuracy of the LNS method, it is actual that the LNS has not been applied for the ultrapure water industry. Furthermore, the SEMI C79 does not verify the accuracy of the LNS method for ultrapure water. Because SEMI C79 provides a guide to the test method “to evaluate filter elements” used in UPW fluid streams, in here, filters are challenged at high particle concentrations not representative of real conditions.
Withdrawal / X / No withdrawal made / GO TO “Related” section
Withdrawal document received by staff on XXXX / GO TO “Final” à (A)
Related / Motion and Reason / X / “Related” is mutually agreed upon.
*This motion can be appended to the motion for Persuasive (See Persuasive Section)
Negative is related (needs over 1/3 votes to pass)
Negative is not related (needs 2/3 or more votes to pass)
Reason / XXXX
Motion by/2nd by / Name (Company)/Name (Company)
Discussion
Result of Vote (check ONE) / XX-XX
[Negative is related] 1/3 / GO TO “Persuasive”
[Negative is not related] < 2/3
2/3=< [Negative is not related] / GO TO “Final” à (B)
Persuasive / Motion and Reason / Negative is related and persuasive (needs over 1/3 votes to pass)
X / Negative is related and not persuasive (needs 2/3 or more votes to pass)
Reason / ***Previously Considered Negative***
Per ¶2.11.3.1.6 of the Procedure Manual (March 2015):
To avoid unnecessary delays, a negative based on an issue that has been previously dealt with by the TC Chapter may be voted to be not persuasive on the basis of the prior discussion:
1. The document was changed to a Guide to address concern of the single source. Additional sources may be available in the future and this will help to change the Guide to another Standard document in the future.
2. At this point (according to the balloted version of the document), LNS is not proposed for the on-line particle testing in actual UPW systems. This Guide is applicable for the off-line testing on the resin in the lab setting. It is important to emphasize that the choice of the method was driven by actual concern that virgin resin may pose contamination issue in the advanced fabs. LNS was the only known to the task force method demonstrated for its capability to detect 10 nm particles. The experimental work conducted for testing ion exchange resin samples from numerous sources (results provided in the Appendix) provided consistent results and adequate indication of the level of the resin contamination. The semiconductor companies end users participating in the task force found the method helpful for their ongoing risk management.
3. LNS was indeed validated for SEMI C079 by using reference gold particle standard. The data for the LNS validation was included in the C079 document. The same methodology is applicable for the resin testing – LNS’s performance is being verified or calibrated against 10nm gold NIST particles. This practice would validate its performance and ability to detect particles accurately. This approach was accepted for C079.
Motion by/2nd by / Don Hadder Jr. (Intel) / David Kandiyeli (Mega Fluid Systems)
Discussion / None.
Result of Vote (check ONE) / 4-0
[Negative is related and persuasive] 1/3 / GO TO “Final” à (E)
[Negative is related and not persuasive] < 2/3
2/3=<[Negative is related and not persuasive] <90% / GO TO “Final” à (C)
X / 90% = [Negative is related and not persuasive] / GO TO “Not Significant Finding Option”
Not Significant Finding Option / This option can only be used “if the committee finds a negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action”. (Regulations ¶ 9.5.3.3.2)
X / It is mutually agreed upon to term the negative “not significant” / GO TO à (D)
It is mutually agreed upon to term the negative “significant” / GO TO à (C)
Motion / The negative is “not significant”.
Motion by/2nd by / Name (Company)/Name (Company)
Vote / XX-XX Motion passed with simple majority / GO TO à (D)
XX-XX Motion failed with simple majority / GO TO à (C)
Final / Negative is:
(A) / withdrawn (counted under h in disposition)
(B) / not related (counted under i in disposition)
(C) / related and not persuasive (significant)
X / (D) / not significant (counted under j in disposition)
(E) / related and persuasive / DOCUMENT FAILS
Comment generated. See comment #x
A&R / Not approved
Reason:
Disposition of Reject 1
1 / Original number of Negatives / (g)0 / # of Negatives withdrawn / (h)
0 / # of Negatives found not related / (i)
1 / # of Negatives found not significant / (j)
Final / X / g-(h+i+j)=0 / Reject is Not Valid and is not included in the denominator of § VI. Approval Conditions Check
g-(h+i+j)>0 / Reject is included in the denominator of § VI. Approval Conditions Check
Reject without a Negative / Not Valid
Note: If all of the negative material included with a reject vote is withdrawn, determined to be not related, or determined to be not significant, the reject vote is not valid. (Regulations ¶ 9.4.3.3)
A&R / Not approvedReason:
Reject 2 - Takehito Mizuno (Pall)
Negative 1 of Reject 2
Negative / Referenced Section / *TF/Committee to fill in if necessaryReason / *Original negative comment and justification should be included.
No definition of High Purity ion exchange resin. How much cleanliness is needed to say 'High purity'.
Withdrawal / X / No withdrawal made / GO TO “Related” section
Withdrawal document received by staff on XXXX / GO TO “Final” à (A)
Related / Motion and Reason / X / “Related” is mutually agreed upon.
*This motion can be appended to the motion for Persuasive (See Persuasive Section)
Negative is related (needs over 1/3 votes to pass)
Negative is not related (needs 2/3 or more votes to pass)
Reason / XXXX
Motion by/2nd by / Name (Company)/Name (Company)
Discussion
Result of Vote (check ONE) / XX-XX
[Negative is related] 1/3 / GO TO “Persuasive”
[Negative is not related] < 2/3
2/3=< [Negative is not related] / GO TO “Final” à (B)
Persuasive / Motion and Reason / Negative is related and persuasive (needs over 1/3 votes to pass)
X / Negative is related and not persuasive (needs 2/3 or more votes to pass)
Reason / The entire document deals with this issue.
The entire document is about a systematic approach to determination of the cleanliness of the resin. It also specifies location of the resin application in the UPW systems. The following is the 1st sentence of the document that addresses this point:
"This document describes a guide for analysis of virgin high purity ion exchange (HPIX) resin suitable for use in Ultrapure Water (UPW) polish applications."
The specific definition of the purity is left for the end users decision, as different manufacturing processes may have different levels of the sensitivity to the contamination. This is stated in the limitation section of the document.
Motion by/2nd by / Don Hadder Jr. (Intel) / Slava Libman (Air Liquide)
Discussion / None.
Result of Vote (check ONE) / 3-0
[Negative is related and persuasive] 1/3 / GO TO “Final” à (E)
[Negative is related and not persuasive] < 2/3
2/3=<[Negative is related and not persuasive] <90% / GO TO “Final” à (C)
X / 90% = [Negative is related and not persuasive] / GO TO “Not Significant Finding Option”
Not Significant Finding Option / This option can only be used “if the committee finds a negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action”. (Regulations ¶ 9.5.3.3.2)
X / It is mutually agreed upon to term the negative “not significant” / GO TO à (D)
It is mutually agreed upon to term the negative “significant” / GO TO à (C)
Motion / The negative is “not significant”.
Motion by/2nd by / Name (Company)/Name (Company)
Vote / XX-XX Motion passed with simple majority / GO TO à (D)
XX-XX Motion failed with simple majority / GO TO à (C)
Final / Negative is:
(A) / withdrawn (counted under h in disposition)
(B) / not related (counted under i in disposition)
(C) / related and not persuasive (significant)
X / (D) / not significant (counted under j in disposition)
(E) / related and persuasive / DOCUMENT FAILS
Comment generated. See comment #x
A&R / Not approved
Reason:
Negative 2 of Reject 2
Negative / Referenced Section / *TF/Committee to fill in if necessary11.2.2.1
Reason / *Original negative comment and justification should be included.
Why the range of particle size was limited 0.3um - 1.0um? The industry usually use below 30nm LPC.
Withdrawal / X / No withdrawal made / GO TO “Related” section
Withdrawal document received by staff on XXXX / GO TO “Final” à (A)
Related / Motion and Reason / X / “Related” is mutually agreed upon.
*This motion can be appended to the motion for Persuasive (See Persuasive Section)
Negative is related (needs over 1/3 votes to pass)
Negative is not related (needs 2/3 or more votes to pass)
Reason / XXXX
Motion by/2nd by / Name (Company)/Name (Company)
Discussion
Result of Vote (check ONE) / XX-XX
[Negative is related] 1/3 / GO TO “Persuasive”
[Negative is not related] < 2/3
2/3=< [Negative is not related] / GO TO “Final” à (B)
Persuasive / Motion and Reason / Negative is related and persuasive (needs over 1/3 votes to pass)
X / Negative is related and not persuasive (needs 2/3 or more votes to pass)
Reason / This negative is a misunderstanding on the purpose of the LPC application in the static leach.
In the static leach conditions, it is able to generate very high concentration of the particles of the all sizes. The resin that was cleaned for 10nm particles also showed clean particles at larger size. This provides very good indication of the cleanliness potential of the resin. Combination of the grab sample analysis using LPC at large size of the particles and LNS at smaller sizes covers the entire range of the particles.
Please note that application of the grab sample LPC for leach particle analysis at very small particles sizes 20nm-100nm is very difficult, as the instruments will quickly clog by the high concentration of larger particles.
Motion by/2nd by / Don Hadder Jr. (Intel) / Slava Libman (Air Liquide)
Discussion / None.
Result of Vote (check ONE) / 3-0
[Negative is related and persuasive] 1/3 / GO TO “Final” à (E)
[Negative is related and not persuasive] < 2/3
2/3=<[Negative is related and not persuasive] <90% / GO TO “Final” à (C)
X / 90% = [Negative is related and not persuasive] / GO TO “Not Significant Finding Option”
Not Significant Finding Option / This option can only be used “if the committee finds a negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action”. (Regulations ¶ 9.5.3.3.2)
X / It is mutually agreed upon to term the negative “not significant” / GO TO à (D)
It is mutually agreed upon to term the negative “significant” / GO TO à (C)
Motion / The negative is “not significant”.
Motion by/2nd by / Name (Company)/Name (Company)
Vote / XX-XX Motion passed with simple majority / GO TO à (D)
XX-XX Motion failed with simple majority / GO TO à (C)
Final / Negative is:
(A) / withdrawn (counted under h in disposition)
(B) / not related (counted under i in disposition)
(C) / related and not persuasive (significant)
X / (D) / not significant (counted under j in disposition)
(E) / related and persuasive / DOCUMENT FAILS
Comment generated. See comment #x
A&R / Not approved
Reason:
Negative 3 of Reject 2
Negative / Referenced Section / *TF/Committee to fill in if necessaryAppendix 2
Reason / *Original negative comment and justification should be included.
LPC particle data also should be described because LNS is not popular in the industry as described at background statement. To show only LNS particle data may give misleading information to users as if only LNS were applicable.
Withdrawal / X / No withdrawal made / GO TO “Related” section
Withdrawal document received by staff on XXXX / GO TO “Final” à (A)
Related / Motion and Reason / X / “Related” is mutually agreed upon.
*This motion can be appended to the motion for Persuasive (See Persuasive Section)
Negative is related (needs over 1/3 votes to pass)
Negative is not related (needs 2/3 or more votes to pass)
Reason / XXXX
Motion by/2nd by / Name (Company)/Name (Company)
Discussion
Result of Vote (check ONE) / XX-XX
[Negative is related] 1/3 / GO TO “Persuasive”
[Negative is not related] < 2/3
2/3=< [Negative is not related] / GO TO “Final” à (B)
Persuasive / Motion and Reason / Negative is related and persuasive (needs over 1/3 votes to pass)
X / Negative is related and not persuasive (needs 2/3 or more votes to pass)
Reason / LPC particle application and its respective data were included in the document on page 23 A2-5.
The TF tried LPC but it was not capable addressing the need of controlling 10nm size, which is already a killer size per ITRS. Application of the newer instruments of major LPC suppliers (20nm-30nm range) will face similar problem of that of the grab sample analysis. Too many particles will clog the instruments while having no to minimum ability to effectively monitor 10nm particles.
Please note that the purpose of the test is to evaluate the quality of the resin before it is loaded into UPW systems. This approach requires lab test capability. The TF could not find any other than LNS methods that could support such purpose. The TF did consider LPC and even tried one, but failed to achieve the required results.
The TF heard that it is likely that LNS will become available soon in Japan that might address some of the concerns of the limited accessibility to the technique. The TF understand that the instrument is already commercially available. Anyone who is interested in performing analysis following this method can effective do this today. The TF had most major ion exchange resin suppliers as well as some of the major end users involved in the document development. They supported the urgency for the method and approved the methodology.
Motion by/2nd by / Don Hadder Jr. (Intel) / Slava Libman (Air Liquide)
Discussion / None.
Result of Vote (check ONE) / 3-0
[Negative is related and persuasive] 1/3 / GO TO “Final” à (E)
[Negative is related and not persuasive] < 2/3
2/3=<[Negative is related and not persuasive] <90% / GO TO “Final” à (C)
X / 90% = [Negative is related and not persuasive] / GO TO “Not Significant Finding Option”
Not Significant Finding Option / This option can only be used “if the committee finds a negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action”. (Regulations ¶ 9.5.3.3.2)
X / It is mutually agreed upon to term the negative “not significant” / GO TO à (D)
It is mutually agreed upon to term the negative “significant” / GO TO à (C)
Motion / The negative is “not significant”.
Motion by/2nd by / Name (Company)/Name (Company)
Vote / XX-XX Motion passed with simple majority / GO TO à (D)
XX-XX Motion failed with simple majority / GO TO à (C)
Final / Negative is:
(A) / withdrawn (counted under h in disposition)
(B) / not related (counted under i in disposition)
(C) / related and not persuasive (significant)
X / (D) / not significant (counted under j in disposition)
(E) / related and persuasive / DOCUMENT FAILS
Comment generated. See comment #x
A&R / Not approved
Reason:
Disposition of Reject 2