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Background Statement for SEMI Draft Document 4562

REAPPROVAL OF SEMI M46, TEST METHOD FOR MEASURING CARRIER CONCENTRATIONS IN EPITAXIAL LAYER STRUCTURES BY ELECTROMECHANICAL CAPACITANCE VOLTAGE (ECV) PROFILING

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

SEMI M046-00-1101E is due for its Five Year Review. This process is required by the SEMI Regulations to ensure that the standard is still valid.

At the SEMICON Europa 2007 in Stuttgart, Germany, the Compound Semiconductor Committee approved the yellow ballot distribution for the reapproval of M46.

This technical ballot is intended for the re-approval of M46 and does not present any changes to the aforementioned document.

Purpose of SEMI M046-00-1101E

The purpose of this document is to specify a method to measure the carrier concentration and carrier concentration vs. depth profile of epitaxial layers by Electromechanical Capacitance Voltage (ECV) profiling.

Scope of SEMI M046-00-1101E

  • This test method covers a procedure for measuring the carrier concentration of epitaxial layers by ECV profiling. This method focuses on improving the accuracy and repeatability of the measurement by standardizing the test conditions and reporting and by routine calibration of the measurement.
  • This test method is intended to cover the majority of routine samples measured. However, because of the number of different materials encountered it cannot cover every contingency.
  • This standard may involve hazardous materials. This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

The results of this ballot will be discussed at the next Compound Semiconductor committee meeting on October 7th 2008 in conjunction with SEMICON Europa 2008 in Stuttgart, Germany.

If you need a copy of the document in order to cast a vote, please contact the following person within SEMI.

Saviour Alfino

SEMI Standards, Europe

Tel: (32) (2) 289.64.90

Email:

This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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