Materials Science & ElECTRONIC ENGINEERING

Baltes, Brand, Fedder, Hierold, Korvink, Tabata (series eds.)

Brand, O., Fedder, G.K. (volume eds.)

O. Brand, Georgia Tech, Atlanta, GA, USA

G. K. Fedder, Carnegie Mellon University, Pittsburgh, PA, USA

CMOS-MEMS

General & Introductory Materials Science

Volume 2 in the series ‘Advanced Micro and Nanosystems’
2005. XII, 596 pages with 312 figures and 32 tables. Hardcover.
€199.-/sFr294.-
Series price:
€169.-/sFr250.-
ISBN 3-527-31080-0

Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.

In this topical volume CMOS-MEMS, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles.

The book introduces readers to this field and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

General & Introductory Materials Science

FROM THE CONTENTS

Fabrication Technology
O. Brand

Material Characterization
J. O. Paul, P. Ruther

Monolithically Integrated Inertial Sensors
G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T.Denison, J. Kuang, S. Lewis

CMOS-MEMS Acoustic Devices
J. J. Neumann, K. J. Gabriel

RF-CMOS-MEMS
T. Mukherjee, G. K. Fedder

CMOS-based Pressure Sensors
H.-J. Timme

CMOS-based Chemical Sensors
A. Hierlemann

Biometric Capacitive CMOS Fingerprint Sensor Systems
C. Hierold, G. Hribernig, T. Scheiter

CMOS-based Biochemical Sensing Systems
J. Lichtenberg, H. Baltes

CMOS-based Thermal Sensors
T. Akin

Circuit and System Integration
C. Hagleitner, U. Kirstein

FROM THE CONTENTS

FROM THE CONTENTS