Materials Science & ElECTRONIC ENGINEERING
Baltes, Brand, Fedder, Hierold, Korvink, Tabata (series eds.)
Brand, O., Fedder, G.K. (volume eds.)
O. Brand, Georgia Tech, Atlanta, GA, USA
G. K. Fedder, Carnegie Mellon University, Pittsburgh, PA, USA
CMOS-MEMS
General & Introductory Materials Science
Volume 2 in the series ‘Advanced Micro and Nanosystems’
2005. XII, 596 pages with 312 figures and 32 tables. Hardcover.
€199.-/sFr294.-
Series price:
€169.-/sFr250.-
ISBN 3-527-31080-0
Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.
In this topical volume CMOS-MEMS, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles.
The book introduces readers to this field and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
General & Introductory Materials Science
FROM THE CONTENTS
Fabrication Technology
O. Brand
Material Characterization
J. O. Paul, P. Ruther
Monolithically Integrated Inertial Sensors
G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T.Denison, J. Kuang, S. Lewis
CMOS-MEMS Acoustic Devices
J. J. Neumann, K. J. Gabriel
RF-CMOS-MEMS
T. Mukherjee, G. K. Fedder
CMOS-based Pressure Sensors
H.-J. Timme
CMOS-based Chemical Sensors
A. Hierlemann
Biometric Capacitive CMOS Fingerprint Sensor Systems
C. Hierold, G. Hribernig, T. Scheiter
CMOS-based Biochemical Sensing Systems
J. Lichtenberg, H. Baltes
CMOS-based Thermal Sensors
T. Akin
Circuit and System Integration
C. Hagleitner, U. Kirstein
FROM THE CONTENTS
FROM THE CONTENTS