Editorial Changes for 4770A

Note: Original section number and at least one full sentence are required in “FROM” and “TO” fields.

1 / FROM: Section 4.1
NOTE 2: SEMI is developing a Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers, intended to be used in conjunction with this document.
TO: Section XXX(Related Standards)
SEMI M76 — Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers
Justification: (If necessary)
No change in technical content. Changes to Notes are editorial by definition, as are additions or deletions from the Related Standards section.
2 / FROM: Following Section 2.3
(add note as shown below)
TO: Following Section 2.3
NOTE: The carrier dimensions and door force have been developed based on the assumption for a shipping system and drop height as called out in ISTA-3E (unitized loads).
Justification: (If necessary)
No change in technical content. Changes to notes are editorial by definition.
3 / FROM: Section 6.2
NOTE 4: The top surfaces of the Kinematic Coupling Pins are not the surfaces on which the carrier rests. Appendix 3 shows how test fixtures can be made to rest on the KCPs to duplicate the position of a carrier.
TO: Section 6.2
NOTE 4: The top surfaces of the Kinematic Coupling Pins are not the surfaces on which the carrier rests. Appendix 1 shows how test fixtures can be made to rest on the KCPs to duplicate the position of a carrier.
Justification: (If necessary)
Typographical error. The information in question is found in Appendix 1.
4 / FROM: Section 14.2
14.2 The carrier door is on the front of the 450 MAC. The door and its frame must be designed to mate with a loadport that conforms to the Mechanical Interface Specification for 450 mm Load Port. The MAC door and its frame must have surfaces that mate with seal areas, the MAC door sensing area, and reserved spaces for vacuum application. See Figures 19, 21 & 23.
TO: Section 14.2
14.2 The carrier door is on the front of the 450 MAC. The door and its frame must be designed to mate with a loadport that conforms to the Mechanical Interface Specification for 450 mm Load Port [SEMI E154]. The MAC door and its frame must have surfaces that mate with seal areas, the MAC door sensing area, and reserved spaces for vacuum application. See Figures 19, 21 & 23.
Justification: (If necessary)
Editorial style. SEMI E154 is the “Mechanical Interface Specification for 450 mm Load Port”.
5 / FROM: (multiple sections)

TO: (multiple sections)

Justification: (If necessary)
PDF Conversion error. The picture to be removed is a duplicate of Figure 4, so no change in technical content occurs due to its removal.
6 / FROM: Section 17.5
17.5 The carrier shall have features to constrain the wafer along all axes so the wafer will be within the wafer pickup volume after the door is opened. See Error! Reference source not found. & 32.
TO: Section 17.5
17.5 The carrier shall have features to constrain the wafer along all axes so the wafer will be within the wafer pick-up volume after the door is opened. See Figure 31 & 32.
Justification: (If necessary)
PDF Conversion error. Wafer pick-up volume details are illustrated in Figures 31 (Wafer Pick-Up Volume (Between Wafer Supports)) and 32 (Wafer Pick-Up Side View), as is obvious from their titles.
7 / FROM: Figure 36 (excerpted)

TO: Figure 36

Justification: (If necessary)
Typographical error. r38’s value range is correctly specified as “≥R229” in Figures 28 and 34.
8 / FROM: Table 1, row r38

TO: Table 1, row r38

Justification: (If necessary)
Typographical error. r38 clearly appears in Figures 28, 34, and 36. (Columns 1 and 2 are “Symbol Used” and “Figure” respectively.)
9 / FROM: Table 1, rows y15 ,y16, and y18, 3rd cells

TO: Table 1, rows y15, y16, and y18, 3rd cells
y15 row: 3rd cell value should be 194.00 ± 0.05
y16 row: 3rd cell value shoule be 115.50 ± 0.05
y18 row: 3rd cell value shoule be 145.00 ± 0.05
Justification: (If necessary)
Consistency of formatting. The number of significant digits for each value is obvious from the tolerance expressed for each.
10 / FROM: Table 2, rows z44 and z45

TO: Table 2, rows z44 and z45

Justification: (If necessary)
Typographical error. z34 is correctly shown as ≤181 in Figure 20 and Table 1, and z42 is correctly shown as ≤13 in Figure 20, Table 1, and Table 2.
Motion / To approve the above editorial changes
Motion by/2nd by / Alan Crockett (KLA-Tencor) / John Burns (Entegris)
Discussion
Vote / 18-0 Motion passed