Background Statement for SEMI Draft Document 5728

Background Statement for SEMI Draft Document 5728

Semiconductor Equipment and Materials International

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Background Statement for SEMI Draft Document 5728

NewStandard: Test Method for the Wire Tension of Multi-wire Saws

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background statement:

With the rapid development of PV and semiconductor industry all over the world, multi-wire saws is more and more widely used. However, currently there is no common industrial standard available in this field, thus customers can’t effectively verify machine’s performance.

To solve the above problem, the research group developed a basic testing method based on mass production and usage data collected from many research institutes and enterprises. Performance of multi-wire saws can be effectively verified by the method.

Review and Adjudication Information

Task Force Review / Committee Adjudication
Group: / Multi-wire Saws Task Force / China Photovoltaic Committee
Date: / March 2nd , 2015 / March 17th , 2015
Time &Timezone: / 9:00--12:00 / 9:30--18:00
Location: / CETC 48th Institute / Pudong Ballroom 4, Kerry Hotel, Pudong, Shanghai
City, State/Country: / Changsha, China / Shanghai, China
Leader(s): / Honglin Sui(CETC 48th Institute) / Guangchun Zhang(CanadianSolar)
Jun Liu(CESI)
Standards Staff: / Kris Shen(SEMI China)
/ Kris Shen(SEMI China)

Meeting date and time are subject to change, and additional TF review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.Check for the latest schedule.

If you have any questions, please contact the ballot author at:

Honglin Sui/ CETC 48th Institute

Tel: +86.18627554801


SEMI Draft Document 5728

New Standard: Test Method for the Wire Tension of Multi-wire Saws

1 Purpose

1.1 The documentprovides a test method for the wire tension of multi-wire saws, which helpsthe customers to confirmthe ability of controlling wire tension and provides a reliable basisfor wiretensioncalibration.

1.2 The document includes testprinciples, test equipments,testprocedures andcalculationfor theeffective control range of wire tension.

2 Scope

2.1 The document provides a test method for the wire tension of multi-wire saws.

2.2 The document is applicable to tension test of brick master and other wire cutting equipments.

NOTICE:SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Referenced Standards and Documents

3.1 None

4 Terminology

4.1 Refer to the SEMI Standards Compilation of Terms (COTs) for a list of the current Abbreviations, Acronyms, Definitions, and Symbols.

4.2 Definitions

4.2.1 Tsi —Theithset value ofthe wire tension (i= 1, 2, 3 ... n).

4.2.2 Tpij —Thejth practical value ofthe wire tension when the set value is Tsi(j = 1, 2, 3 ... m).

4.2.3 Tpi —Theaverage of practical values when the set value is Tsi.

4.2.4 ΔT—The allowable deviation of practical value.

4.2.5 Tmax_i —The maximum allowable value of Tpi when the set value is Tsi.

4.2.6 Tmin_i —The minimum allowable value of Tpiwhen the set value is Tsi.

4.2.7 Tup —The upper limit value of the control range for wire tension, determined by the performance parameters of equipment.

4.2.8 Tlow —The lower limit value of the control range for wire tension, determined by the performance parameters of equipment.

5 Summary of Test Method

5.1 This test method uses a single-point measurement. Schematic diagram is shown in Figure 1. Select a point between the winding wheel andthe main roller, than wire tensionvalues can be measured witha strain-gauge tensionmeter.With the comparison of practical value and set value, the effectivecontrol range of wire tension could be calculated.

Figure 1

Schematic diagram of the wire tension test of multi-wire saws

6 Test Conditions

6.1 The test conditions must meet the following requirements:

6.1.1 Ambient temperature: 18℃~28℃.

6.1.2 Relative humidity <75%.

6.1.3 Voltage fluctuations do not exceed rating of ±10%.

7 Apparatus

7.1 Test devices must be approved by a professional metrology institute and certified within the validity period.

7.1.1 Strain-gaugetensionmeterwith wire diameter compensator (accuracybetter than0.5%, the maximum wire speed ≥1000m / min).

7.1.2 Wire for test. The maximum tension value of wireshould be higher than Tup.

8 Procedure

8.1 The multi-wire saws is set and wired.

8.2 Place the strain-gauge tensionmeter on a point between the winding wheelandthe mainroller.Measurement is shown in Figure 2.

Figure 2

Schematic diagram oftensiontest

8.3 The selection ofset value Tsi.

8.3.1 Select Tlowas thefirstset value Ts1, Ts1=Tlow.

8.3.2 The rest set values can be calculated by the formula Tsi = Ts1+ (i-1) × 2(2N is the recommended increase step size).

8.3.3 The selection for Tsn: WhenTsi = Ts1+ (i-1) × 2≥Tup, setn=i, Tsn =Tup.

8.4 Set the wirespeed of the multi-wire saws to process speed. When the set value is Tsi, Tpij(j=1,2,3…m) should be recorded every few seconds, the test procedure of Tpiis shown in Figure 3 (recommendedinterval time is10s, m = 5, ΔT=0.3N).

Figure 3

The Test Procedure of Tpi

9 Calculation for theEffective Control Range of Wire Tension

9.1 According toTp1, Tp2... Tpn,test curveis plottedas shown in Figure 4.

9.2 According to Figure 4, the range of Tpi between Tmin_iandTmax_iis [Ts2, Ts21], which is the effective control range of wire tension (recommendedTmax_i=Tsi+1, Tmin_i=Tsi-1).

Figure 4

The Test Curve of Tpi

10 Test Report

10.1 The test report should include at least the following elements:

10.1.1 The model name of multi-wire saws;

10.1.2 The type and model name of the detection equipment;

10.1.3 The test environment and conditions;

10.1.4 Test basis;

10.1.5 Test results;

10.1.6 Test dates and personnel;

10.1.7 Authorized stamp of testing units.

NOTICE: SEMI makes no warranties orrepresentations asto the suitability of the Standards and Safety Guidelines set forth herein for any particular application. Thedetermination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users arecautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature,respecting any materials orequipment mentioned herein. Standards and Safety Guidelines are subject to changewithout notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of anypatentrights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users ofthis Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights,and the risk of infringement of such rights are entirely their own responsibility.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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