Semiconductor Equipment and Materials International

3081 Zanker Road

San Jose, CA 95134-2127

Phone:408.943.6900 Fax: 408.943.7943

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Background Statement for SEMI Draft Document 4439

Re-approval of SEMI M9.5-96E:STANDARD FOR ROUND 100 mm POLISHED MONOCRYSTALLINE GALLIUM ARSENIDE WAFERS FOR ELECTRONIC DEVICE APPLICATIONS

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

SEMI M9.5-96E is long overdue for its Five Year Review. This process is required by the SEMI Regulations to ensure that the standard is still valid.

At the Japan Standards meetings at the JA Compound Semiconductor Materials Committeeapproved the yellow ballot distribution for the reapproval of M9.5.

This technical ballot is intended for the re-approval of M9.5 and does not present any changes to the aforementioned document.

Ballot Voting Information

SEMI Standards Regulations requires a 60% return rate from the total number of registered voting members. There are three valid ways to vote on this letter (yellow) ballot:

  • Accept Vote (Including Accept with Comments) – If you are in agreement that SEMI M9.5 should be reapproved, vote accept. If you are in agreement that SEMI M9.5 should be reapproved, but have suggestions for editorial clarification or wish to offer related items for future consideration (new business), please vote accept and include your suggestions at the bottom of the voting sheet.
  • Negative Vote – If you are not in agreement that SEMI M9.5 should be reapproved, vote reject. A negative vote must be accompanied by a written explanation of your objections to the document.
  • Abstaining Vote – If you are not sufficiently familiar with the topic area or have insufficient interest to provide a technical opinion on the document, vote abstain. If you wish to provide editorial clarification on some point or make a general observation on the document, you may include a comment with an abstention.

This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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Semiconductor Equipment and Materials International

3081 Zanker Road

San Jose, CA 95134-2127

Phone:408.943.6900 Fax: 408.943.7943

hb khghgh1000A4377

This document is re-balloted in Cycle 7, 2007 because this ballot had the low voting rate in cycle 2, 2007.

The results of this ballot will be discussed at the next JACompound Semiconductor & Materials Committee Meeting at SEMICON Japan 2007 on Dec 6, 2007in Makuhari Messe, Chiba.

Please note that the voting deadline for document 4439 and other Cycle 7 ballots are due Tuesday, November 20. Therefore, we kindly request that you submit your votes in a timely manner.

If you need more information or a copy of the document in order to cast a vote, please contact the following person within SEMI:

Hirofumi Kanno

SEMI Standards, Japan

Tel: 81-3-3222-5819

Email:

This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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