Development of Epitaxial Functional Oxide Nanomaterials on Silicon Based on Chemical Strategies

Development of epitaxial functional oxide nanomaterials on silicon based on chemical strategies

Adrian Carretero-Genevrier

Institut des Nanotechnologies de Lyon (INL) CNRS- Ecole Centrale de Lyon, 36 avenue Guy de Collongue, 69134 Ecully, France

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Abstract:

The technological impact of combining substrates technologies with the properties of functional advanced oxides is colossal given its relevant role in the development of novel and more efficient devices. However the precise control of interfaces and crystallization mechanisms at the nanoscale of dissimilar materials need to be further developed. As an example, the integration of high quality epitaxial oxide films and nanostructures on silicon as hybrid structures rest extremely challenging because these materials are structurally and thermally different.

In this light, this work describes promising strategies used to accommodate advanced oxide nanostructures on silicon substrate via chemical solution deposition approach. Divers examples will be presented separated in two different approaches i.e: (i) oxide materials entirely performed by soft chemistry, such as nanostructured piezoelectric quartz thin films on silicon [1] or 1D complex oxide nanostructures epitaxially grown on silicon [2], and (ii) complex oxide materials performed by combining soft chemistry and physical techniques, such as epitaxial perovskite oxide thin films on silicon using the combination of soft chemistry and MBE [3].

As a conclusion, this presentation will cover cutting-edge strategies based on the potential of combining epitaxial growth and chemical solution deposition to develop functional oxide nanomaterials on silicon with novel structures and improved physical properties.

[1] Soft chemistry based routes to epitaxial A-quartz thin films with tunables textures

A.Carretero-Genevrier, M.Gich, L.Picas, J.Gazquez, , D.Grosso, C.Boissiere, J.Rodriguez-Carvajal, and Clement Sanchez. Science. Vol 340. Pp 827-831 (2013)

[2] Direct Monolithic Integration of Vertical Single Crystalline Octahedral Molecular Sieve Nanowires on Silicon.

A. Carretero-Genevrier, J. Oro-Sole, J. Gazquez, C. Magn, L. Miranda, T. Puig, X. Obradors, E. Ferain, C. Sanchez, J. Rodriguez-Carvajal, N. Mestres. Chemistry of Materials 26 1019 (2014)

[3] Integration of functional complex oxide nanomaterials on silicon

J. Vila-Fungueirio, R. Bachelet, G. Saint-Girons, M. Gendry, M. Gich, J. Gazquez, E. Ferain, F. Rivadulla, J. Rodriguez-Carvajal, N. Mestres, A. Carretero-Genevrier Frontiers in Physics 3, 38 (2015)