“GH.ASACHI” TECHNICAL UNIVERSITY of IAŞI Approved

FACULTY OF MECHANICAL ENGINEERING DEAN

Machine Design and Mechatronics Department Prof.dr.ing. Spiridon Creţu

Academic year 2006-2007

SYLLABUS

for the discipline:

MICROELECTROMECHANICAL SYSTEMS - MEMS

Specialties:, Mechatronics, five year, first semester

Type of matter: Compulsory matter

Courses holder: Prof. dr. ing. Dumitru OLARU

Applicative activities holder:Prof. dr. ing. Dumitru OLARU

Structure in curriculum:

Semester / Number of hours per week / Evaluation / Number of credits, K / Total number of hours / Total number of hours
Course / Seminar / Laboratory
activities / Project activities / C / S / L / P
9 / 2 / - / 1 / - / Exam / 3 / 28 / - / 14 / - / 42

CONTENT

A. THE STRUCTURE OF THE COURSE
1.Introduction: history of MEMS, progress in micro and nanotechnology, micro sensors, micro actuators, micro transducers, overview of MEMS processes, MEMS market…………………..2 hours.
  1. Fundaments of biomimetics: biologically inspired technologies...... 2 hours.
  2. Materials and technologies for MEMS: silicon technologies, silicon wafers, substrates and additive materials, surfaces micromachining, bulk micromachining, CVD and PVD technologies, epitaxy, lithography, etching, multi-user MEMS processes –MUMPs…………………………………….4 hours.
  3. Packaging and assembly of the MEMS ……………………………………………..…………2 hours
  4. Forces in MEMS: surface forces- capillary, adhesive, van der Wals, electrostatic forces,

friction forces……………………………………………………………………………………..2 hours.

  1. Stress and deformations in the microelements: cantilevers, beams, bridges…………………..2 hours.
  2. Mechanical transduction techniques: piezoresistivity, piezoelectricity, capacitive techniques, optical techniques, resonant techniques……………………………………………………………..…..2 hours.
  3. Actuation techniques: electrostatic, piezoelectric, thermal, magnetic…………………………..2 hours.
  4. Micro sensors: pressure micro sensors, force and torque micro sensors, inertial micro sensors, flow micro sensors, thermal micro sensors...... 4 hours
  5. Micro actuators: electrostatic micro actuators, micro actuators with smart materials…………4 hours.
  6. The future of the MEMS: medical applications, space applications, biological applications.....2 hours

B. THE STRUCTURE OF PRACTICAL APPLICATIONS

  1. Elaboration of a Multi-Layer Polysilicon Surface Micromachining Process. Applications for microgears, micromotors, microhingers……………………………………………………… .7 hours;
  2. Elaborating of a research project report focused on a single microsensor or microactuator system…………………………………………………………………………………………..7 hours.

EVALUATION OF THE STUDENTS.

60% - exam;

40% - the activity at the practical applications;

BIBLIOGRAPHY

  1. S. Beeby, et. Al., MEMS Mechanical Sensors, Artech House, Inc.,2004;
  2. PolyMUMS Design Handbook, MEMSCAP INC.,Revision 11.0, 2005;
  3. N. Lobontiu, E. Garcia, Mechanics of Micromechanical Systems, Kluber Academic Publishers, 2004;
  4. Mohamed Gad –el-Hak, editor, The MEMS Handbook, CRC Press, 2002;

DISCIPLINE TITULAR,

Prof. dr. ing. Dumitru Olaru

HEAD OF THE DEPARTMENT,

Prof. dr. ing. Barbu Drăgan

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