Background Statement for SEMI Draft Document 6146

SEMI

673 S. Milpitas Blvd.

Milpitas, CA 95035-5446

Phone: 408.943.6900

hb khghgh1000A6146

Background Statement for SEMI Draft Document 6146

LINE-ITEM REVISIONS TO SEMI E35-0312, GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT and SEMI E140-0312, GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR GAS DELIVERY SYSTEMS

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

SEMI E35-0312 and E140-0312 are both due for their mandatory five-year reviews in 2017. Due to some of the changes affecting both SEMI 35 and E140 and/or its Various Materials Excel spreadsheet example and to comply with the Regulations and Procedure Manual, the complete set of proposed changes is being done by three independent Line-Item Letter Ballots. This Line-Item Letter Ballot addresses only those proposed changes that affect both SEMI 35 and SEMI E140 and its Various Materials Excel spreadsheet example that need to be approved simultaneously. SEMI E35 and SEMI E140 and its Various Materials Excel spreadsheet example have been reviewed and edited, as necessary, to make the following technical and/or editorial changes needed in this ballot that are independent of the changes needed that affect only SEMI 35 or SEMI E140 and/or its Various Materials Excel spreadsheet example separately, as defined in the following Line Items. Please note that there are no proposed changes to the equations as defined in SEMI E35, SEMI E140, and its Various Materials Excel spreadsheet example.

Line-Item 1: Change definition and calculation of cost footprint (CF) to cost footprint rectangle area (Acf).

Justification: A major revision (5817A) to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and Weight was approved during the SEMICON West 2016 meetings. The Equipment Cost of Ownership (COO) TF worked with the Physical Interfaces and Carriers (PIC) TF performing the revision to update their definition and details of “cost footprint”, which is also used in SEMI E35 and E140, with the intent to revise SEMI E35 and E140 to use this revised definition.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 8 Doc. 6146 ã SEMIâ

SEMI

673 S. Milpitas Blvd.

Milpitas, CA 95035-5446

Phone: 408.943.6900

hb khghgh1000A6146

Revisions:

# / From: / To:
1 / E35
4.1 SEMI Standards and Safety Guidelines / E35
4.1 SEMI Standards and Safety Guidelines
SEMI E72 — Specification and Guide for Equipment Footprint, Height, and Weight
2 / E140
4.1 SEMI Standards and Safety Guidelines / E140
4.1 SEMI Standards and Safety Guidelines
SEMI E72 — Specification and Guide for Equipment Footprint, Height, and Weight
3 / E35
5.1 Abbreviations and Acronyms
5.1.4 CF — cost footprint (of the equipment) / E35
5.1 Abbreviations and Acronyms
5.1.4 CF — cost footprint (of the equipment)
4 / E35
5.3 Symbols / E35
5.3 Symbols
5.3.1 Acf — cost footprint rectangle area
5 / E140
5.1 Abbreviations and Acronyms
5.1.1 CF — cost footprint (of the equipment) / E140
5.1 Abbreviations and Acronyms
5.1.1 CF — cost footprint (of the equipment)
6 / E140
5.3 Symbols / E140
5.3 Symbols
5.3.1 Acf — cost footprint rectangle area
7 / E35
5.2 Definitions
5.2.12 cost footprint (CF) — the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment. / E35
5.2 Definitions
5.2.12 cost footprint rectangle area, Acf — the area of the cost footprint rectangle, calculated as (Dcf × Wcf) [SEMI E72](CF) — the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment.
NOTE 4: The details for calculating Acf are completely defined in SEMI E72 and are not repeated here in SEMI E35.
8 / E140
5.2 Definitions
5.2.7 cost footprint (CF) — the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment. [SEMI E35] / E140
5.2 Definitions
5.2.7 cost footprint rectangle area, Acf — the area of the cost footprint rectangle, calculated as (Dcf × Wcf) [SEMI E72](CF) — the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment. [SEMI E35]
NOTE 3: The details for calculating Acf are completely defined in SEMI E72 and are not repeated here in SEMI E140.
9 / E35
5.2 Definitions
5.2.20 easement space — the floor space that must remain clear to the rear and sides of the equipment (but not in front of the load face plane). This includes safety aisles, ergonomic maintenance access space, component removal space, and room for doors to swing out. / E35
5.2 Definitions
5.2.20 easement space — the floor space that must remain clear to the rear and sides of the equipment (but not in front of the load face plane). This includes safety aisles, ergonomic maintenance access space, component removal space, and room for doors to swing out.

Page 8 Doc. 6146 ã SEMIâ

SEMI

673 S. Milpitas Blvd.

Milpitas, CA 95035-5446

Phone: 408.943.6900

hb khghgh1000A6146

10 / E140
5.2 Definitions
5.2.12 easement space — the floor space that must remain clear to the rear and sides of the equipment (but not in front of the load face plane). This includes safety aisles, ergonomic maintenance access space, component removal space, and room for doors to swing out. [SEMI E35] / E140
5.2 Definitions
5.2.12 easement space — the floor space that must remain clear to the rear and sides of the equipment (but not in front of the load face plane). This includes safety aisles, ergonomic maintenance access space, component removal space, and room for doors to swing out. [SEMI E35]
11 / E35
5.2 Definitions
5.2.51 shadow footprint — the area of the floor space directly under every part of the equipment during its operation. This area includes any temporary projections from the equipment during loading or processing (e.g., carriers that stick out from the equipment or equipment load ports that protrude only when the equipment is being loaded). / E35
5.2 Definitions
5.2.51 shadow footprint — the area of the floor space directly under every part of the equipment during its operation. This area includes any temporary projections from the equipment during loading or processing (e.g., carriers that stick out from the equipment or equipment load ports that protrude only when the equipment is being loaded).
12 / E140
5.2 Definitions
5.2.26 shadow footprint — the area of the floor space directly under every part of the equipment during its operation. This area includes any temporary projections from the equipment during loading or processing (e.g., carriers that stick out from the equipment or equipment load ports that protrude only when the equipment is being loaded). [SEMI E35] / E140
5.2 Definitions
5.2.26 shadow footprint — the area of the floor space directly under every part of the equipment during its operation. This area includes any temporary projections from the equipment during loading or processing (e.g., carriers that stick out from the equipment or equipment load ports that protrude only when the equipment is being loaded). [SEMI E35]
13 / E35
5.3 Symbols
5.3.5 De — depth of the equipment
5.3.6 Ds — combined depth of the equipment and easement space
5.3.7 We — width of the equipment
5.3.8 Ws — combined width of the equipment and easement space / E35
5.3 Symbols
5.3.5 De — depth of the equipment
5.3.6 Ds — combined depth of the equipment and easement space
5.3.7 We — width of the equipment
5.3.8 Ws — combined width of the equipment and easement space
14 / E140
5.3 Symbols
5.3.1 De — depth of the equipment
5.3.2 Ds — combined depth of the equipment and easement space
5.3.3 We — width of the equipment
5.3.4 Ws — combined width of the equipment and easement space / E140
5.3 Symbols
5.3.1 De — depth of the equipment
5.3.2 Ds — combined depth of the equipment and easement space
5.3.3 We — width of the equipment
5.3.4 Ws — combined width of the equipment and easement space

Page 8 Doc. 6146 ã SEMIâ

SEMI

673 S. Milpitas Blvd.

Milpitas, CA 95035-5446

Phone: 408.943.6900

hb khghgh1000A6146

15 / E35
6.9 Cost Footprint (CF)
6.9.1 The CF is the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment. This is calculated in Equation 5 as:
CF = [We + (1/2) × (Ws – We)] × [De + (1/2) × (Ds – De)]
= (1/4) × (We + Ws) × (De + Ds) (5)
where:
De = Depth of the equipment,
Ds = Combined depth of the equipment and easement space,
We = Width of the equipment, and
Ws = Combined width of the equipment and easement space. / E35
6.9 Cost Footprint Rectangle Area (AcfCF) —
6.9.1 The AcfCF is the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment cost footprint rectangle as defined in SEMI E72. Please see SEMI E72 for complete details.This is calculated in Equation 5 as:
CF = [We + (1/2) × (Ws – We)] × [De + (1/2) × (Ds – De)]
= (1/4) × (We + Ws) × (De + Ds) (5)
where:
De = Depth of the equipment,
Ds = Combined depth of the equipment and easement space,
We = Width of the equipment, and
Ws = Combined width of the equipment and easement space.
[Editor’s Note: Also renumber all of the following equations and their references in the text throughout the Document if required.]
16 / E140
6.2 Cost Footprint
6.2.1 The cost footprint (CF) is the area of the smallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment. This is calculated in Equation 2 as:
CF = [We + (1/2) × (Ws – We)] × [De + (1/2) × (Ds – De)]
= (1/4) × (We + Ws) × (De + Ds) (2)
where:
De = Depth of the equipment,
Ds = Combined depth of the equipment and easement space,
We = Width of the equipment, and
Ws = Combined width of the equipment and easement space. / E140
6.2 Cost Footprint Rectangle Area (Acf) —
6.2.1 The cost footprint (CF)Acf is the area of the cost footprint rectanglesmallest horizontal rectangle that contains all of the shadow footprint and half of the easement space around the equipment as defined in SEMI E72. Please see SEMI E72 for complete details.This is calculated in Equation 2 as:
CF = [We + (1/2) × (Ws – We)] × [De + (1/2) × (Ds – De)]
= (1/4) × (We + Ws) × (De + Ds) (2)
where:
De = Depth of the equipment,
Ds = Combined depth of the equipment and easement space,
We = Width of the equipment, and
Ws = Combined width of the equipment and easement space.
17 / E35, Table 1, 2nd Facilities Row, 4th Column
Multiply the CF of the equipment by the cost of cleanroom space for each class of cleanroom space used.#1 / E35, Table 1, 2nd Facilities Row, 4th Column
Multiply the AcfCF of the equipment by the cost of cleanroom space for each class of cleanroom space used.#1
18 / E140, Table R1-1, Row TA17, 2nd Column
Cost Footprint (CF) or Floor Space Required for Gas Box (or Stick or Component) / E140, Table R1-1, Row TA17, 2nd Column
Cost Footprint Rectangle Area (AcfCF) or Floor Space Required for Gas Box (or Stick or Component)
19 / E140, Table R1-1, Row TA22, 2nd Column
CF or Floor Space Required for Support Equipment / E140, Table R1-1, Row TA22, 2nd Column
AcfCF or Floor Space Required for Support Equipment

Page 8 Doc. 6146 ã SEMIâ

SEMI

673 S. Milpitas Blvd.

Milpitas, CA 95035-5446

Phone: 408.943.6900