STANFORDNANO SHARED FACILITY

GENERAL CLEANROOM MANUAL

The Flexible Cleanroom (FCR)

Spilker Building

Rooms 131A-K

Stanford Nano Patterning Cleanroom (NPC)

Spilker Building

Rooms 005 and 006

Revised September, 2017

Stanford Nano Shared Facilities GeneralCleanroom Manual

Table of Contents

Emergency Numbers

Flexible Cleanroom (FCR)

Nano Patterning Cleanroom (NPC)

1. Lab Basics

1.1 Tool Training

1.2 Layout of the Lab

1.3 Laboratory Access and Hours of Operation

1.4 Equipment Responsibility

1.5 Broken Equipment

1.6 Gowning Procedure

1.7 General Cleanroom Practices (both Labs)

1.8 Laboratory Etiquette

1.9 Visitors

1.10 Personal Tools, Belongings and Equipment

2. Lab Safety

2.1 Cleanroom Staff Responsibilities

2.2 Lab User Responsibilities

2.3 General Cleanroom Safety

2.4 Safety Considerations

2.5 Appropriate Street Clothing and Shoes

2.6 Eye Protection

2.7 Personal Protective Equipment

2.8 Buddy System

2.9 Special Health Concerns

3. Facility Hazards Overview

3.1 Chemical Hazsards

3.2 Electrical Hazards

3.3 Other Hazards

4. Chemical Safety Information

4.1 Manufacturer’s Chemical Labels

4.2 Secondary Use Labels

4.3 Required Lab/Cleanroom Specific Labels

4.4 Safety Data Sheets (SDS)

5. Chemical Hazard Classes

5.1 Liquid Chemical Hazard Categories

5.1.1 Solvents

5.1.2 Corrosives

5.1.3 Oxidizers

5.1.4 Water Reactive Chemicals

5.1.5 Flammables

5.1.6 Toxic/Poison

5.1.7 Non-toxic

5.2 Resists and Other Chemicals

5.2.1 Other Chemicals in the Flexible Cleanroom

5.3 Miscellaneous Materials

6. Chemical Storage

6.1 Background

6.1.1 Flammables

6.1.2 Corrosives

6.1.3 Oxidizers

6.2 General Use Chemicals

6.3 Introducing New Chemicals

6.4 Personal Chemical Storage

7. Chemical Handling

7.1 Personal Protective Equipment

7.2 Safe Operating Procedures

7.3. Chemical Exposure

7.4 Transporting Chemicals to/in the Lab

7.5 Chemical/Hazardous Waste Collection and Disposal

7.6 Solid Hazardous Waste Disposal

7.7 Chemical Spills

8. Emergency Information

8.1 Emergency Equipment

8.2 Emergency Exit Information

8.3 General Emergency Response

8.4 Posted Emergency Response Procedures

8.5 Life threatening medical emergency

8.6 Evacuations

8.6.1 Building Evacuation

8.6.2 Laboratory Evacuation

8.6.3 Wet Bench Room Evacuation and Isolation

8.6.4 Odors in the Lab

8.6.5 Lab Fire

8.6.6 Fire Alarms

8.6.7 Electrical Power Outage

8.6.8 Major Earthquake

8.6.9 Water on Floors

9. Reporting Accidents

9.1 Incident Reporting

9.2 Follow-up

10. Medical Providers or Work Related Injuries

Appendix A: Working with Hydrofluoric Acid (HF)

Appendix B: Chemicals in the Nano Patterning Cleanroom

Appendix C: Flexible Cleanroom Map

Appendix D: Nano Patterning Cleanroom Map

Emergency Numbers

Emergency Phone NumbersFrom Campus PhoneFrom Cell Phone

Life Threatening Emergency9-911650-321-4433

EH&S Emergency Line (chemical spills)x5-9999650-725-9999

Health & Safety Info – 24 hourx3-0448650-723-0448

Facilities Quick Response (broken pipe)x3-2281650-723-2281

Stanford Hospital Emergency Roomx3-5111650-723-5111

Vaden Student Health Centerx4-2273650-724-2273

California Poison Control 9-1-800-222-1222 800-222-1222

Flexible Cleanroom (FCR)

Room 131A 650‐725‐2292

Room 131C (yellow room) 650‐725‐2293

Room 131G (Microfab Shop)650‐725‐9183

Phone in hallway outside of lab 650‐725‐2283

Tom Carver (Lab Mgr.) office x3‐1861 650‐723‐1861

Tom Carver cell (emergencies) 9‐1‐510‐792‐7691 510‐792‐7691

Anthony To (Building Manager) x2-8306 650-272-8306

Address of this Lab: Flexible Cleanroom,

Rooms 131 A‐K,

Spilker Building # 04‐040

348 Via Pueblo

Stanford, CA 94305

Nano Patterning Cleanroom (NPC)

CAD Computer Station650-723-8584

JEOL Desk650-723-8586

Nova Nano SEM650-723-8587

Cliff Knollenberg (Desk) 650-723-1675

Shiva Bhaskaran (Desk) 650-498-5653

Rich Tiberio (Desk)650-725-2299

Anthony To (Building Manager) 650-272-8306

Address of this Lab: Stanford Nano Shared Facilities Rooms 006 A-H (basement)

Spilker Building #04-040

348 Via Pueblo

Stanford, CA 94305

1

SNSF General Cleanroom Manual

Ver. 1.1Sept. 2017

SNSF General Cleanroom Manual

1. Lab Basics

Setting up a Badger Account at SNSF:

All users must have and maintain a valid SNSF Badger account. You must verify thatyour account is active before requesting training within the Flexible Cleanroom or the Nano Patterning Cleanroom.If you have not completed this step, refer to SNSF and create a Badger account.

  • SNF Users: Please note here that SNSF Badger is separate from SNF Badger!
  • All new users are required to review the “Stanford’s Chemical Hygiene Plan” prior toworking in the lab.

1.1 Tool Training

Many of the pieces of equipment in the lab require additional hands‐on training. Manyof the machines have a “person in charge” or staff memberwhom is the first person you should talk to.Never use a machine that you have not been trained on even if you think you know how to use it already, because each machine has its own little quirks and special problems you willneed to learn about.

In the Flexible Cleanroom

You will need to be “checked off” by the person in charge on the operation of a machine before you can useit. At the discretion of the person in charge of that machine (or of the Lab Supervisor),you may be checked off on that machine by another person familiar with the machine orby demonstrating prior experience and knowledge of that particular machine. If you have been checked out on one machine, it doesn't necessarily give you the right to check someone else out on that machine. Check first with the person in charge before training anyone new yourself.

The Ion Milling Machine, Oerlikon Leybold Univex Sputter, and possibly other new machines, are reserved and monitoredvia the Badger user interface. Most other machines are first come, first serve.

On the following page is a list of who is in charge of some of the major pieces ofequipment in the Flexible Cleanroom:

  • Oerlikon Leybold Univex Sputter: Tom Carver, 650 723‐1861
  • Intlvac Ion Milling Machine: Cliff Knollenberg, 650-723‐1675
  • Quintel Mask Aligner: Carsten Langrock, 723‐0464
  • Karl Suss Mask Aligner: John Bartel, 650 725‐2407
  • Plasma Etcher: Tom Carver, John Bartel
  • Knowledgeable users: John Bartel , 650 725‐2407
  • Olympus Microscope (in yellow room): Volunteers?
  • Knowledgeable users: Carsten Langrock,
  • Rapid Thermal Annealer: Volunteers?

Everything else: Check with Tom Carver 650 723‐1861

In the Nano Patterning Cleanroom

The “Person In Charge” is usually a staff member who provides maintenance and trainings on the tool. Contact them regarding tool training for the Badger interlocked tools below.On some of the smaller and simpler tools, a written list of instructions is available for user to review. If after reviewing these directions they do not feel comfortable on a machine, they may contact a staff member for additional training.

  • JEOL e-beam writer: Rich Tiberio
  • Nova SEM: Cliff Knollenberg
  • KJ Lesker e-beam Evaporator: Shiva Bhaskaran
  • Keyence 3D Lase Confocal Microscope: Shiva Bhaskaran
  • Oxford RIE: Usha Raghuram r Cliff Knollenberg
  • Cressington Sputter Coater: Cliff Knollenberg

1.2 Layout of the Lab

The cleanroomsare accessible only from their respective gowning rooms.

In the Flexible Cleanroom:

You will see four doors which lead from the cleanroom to narrow service chases. These service chases are not clean. They act as the return path of laminar flow air which circulates through the lab. Do not enter these service chases from the cleanroom, because the dirty floors in them will contaminate your booties. When it’s necessary to move chemicals from the storagecabinets in the service chases to the cleanroom, please see Tom Carver. There are pass-throughs to use for passing chemicals or other things back and forth between theservice chases and the cleanroom. There is also a pass‐through to pass things into thecleanroom from the gowning room without having to completely gown up.The yellow room is where all photolithography is done, as well as all chemicalprocessing. Please keep the door to the yellow room closed to avoid white light fromexposing photoresist that people may be working with. Due to the high return ducts,there is a small amount of white light that is unavoidable, so keep any unexposedphotoresist‐coated samples in a dark container or wrapped up in aluminum foil if theyneed to stay in that room for extended periods of time.Keep in mind when working with chemicals in the yellow room that there may bepeople trying to do very critical lithography. Avoid stirring up dust and keep the doorshut.At the far end of the lab is the Lab Supervisor’s work area, including two evaporationstations, and four workbenches. Please do not use any of these machines or work areasand do not use any of the tools or fixtures on those benches because they are cleanedfor ultra-high vacuum.

In the Nano Patterning Cleanroom:

The Nano Patterning Cleanroom (006 Suite in the Spilker Building) is accessed by swiping your access card outside the gowning room on the right of the lab. 005 Spilker which is used primarily for storing chemicals and cleanroom supplies is the next door to the right. Upon entering the gowning room users may store backpacks in the lockers and don cleanroom attire. Note that all lab users are required to wearnitrile gloves and safety glasses (required PPE) while working inside the lab. The only exception to this is that lab users are not required to wear safety glasses while sitting directly in front of a microscope. Failure to wear the required PPE may result in the loss of access to SNSF facilities. Additional Personal Protective Equipment maybe necessary when working with chemicals in the wet bench room. After donning the required cleanroom attire, the white light rooms may be entered through the door to the left. The white light rooms hold tools for processing steps where the filtered (yellow) light is not necessary to prevent accidental exposure of resist. These tools currently include the KJ Lesker e-beam evaporator, Oxford Reactive Ion Etcher (RIE), the Keyence 3D scanning confocal laser microscope, and the CAD computer station with the Genisys software package. Behind the white light rooms are the filtered light (yellow light) rooms which help prevent the accidental exposure of undeveloped resist before and after exposure in the writing tools. Unfortunately, a small amount of white light is unavoidable, so keep any unexposed photoresist‐coated samples in a dark container or wrapped up in aluminum foil. The tools in the yellow rooms include the JEOL e-beam writing tool, the Nova SEM (with Nabity e-beam writing package), the Cressington Sputter Coater, the optical inspection microscope, Dektak stylus profiler, FilmSense Ellipsometer, and the wet benches for wet chemical processing. The JEOL and Nova SEM tools are located in the rooms at the back of the lab furthest from the entry hallway and the JEOL has an operator station located immediately in front of its room. The wet benches are located in a room on the right of the lab which is immediately behind (and visible from) the gowning room and is connected by a door to 005 Spilker.

1.3Laboratory Access and Hours of Operation

All users must fully understand the rules and regulations pertaining to the lab and itsuse. Access will be granted to all new users who have:

  1. Been issued a Badger Account and have set it up,
  2. Read and have a working understanding of theCleanroom Manual
  3. Filled outthe “Access Authorization Form” for the Flexible Cleanroom or the “Lab Safety Protocol Checklist” for the Nano Patterning Cleanroom,
  4. Completed all necessary online and hands‐on safety training,
  5. Keep their Badger account current with an active PTA.

New users may be required to take a shortquiz covering the areas of laboratory conduct, laboratory safety, and hazardous wastestorage and labeling. It is very important that all new users read and understand thecontents of this manual.

Once your I.D. card has been activated to access the lab, your I.D. card is for YOUR USEONLY. Every time you use your I.D. card to access the lab, you are entered into theBadger accounting system as a user for that particular day, and you will be billed foreach day that you use the lab. Never loan your card to someone else, because YOU willbeheld accountable for what that person does in the lab. If you loan your cardkey tosomeone else, this may become grounds for revocation of your access and possibledisciplinary action.

  • Besides gaining access to the lab, you will also need to be checked out or trained on eachindividual piece of equipment that you want to use by the person responsible for thatpiece of equipment.
  • Good communication is essential to the operation of the lab. Please read your e‐mailroutinely for messages pertaining to the lab, check the bulletin board next to the labentrance, and read notices posted on pieces of equipment.
  • The lab is open 24 hours a day to qualified users, subject to the provision that at leastone other person who is also a lab user is present outside of normal weekday workinghours. Some temporary users may be restricted to normal business hours.

1.4Equipment Responsibility

Check out: Most major pieces of equipment will have one designated person or staff member whoseresponsibility it will be to instruct and train others in the use of that equipment. A person will beconsidered "checked out" or “trained” when the person responsible is satisfied that the userunderstands the proper operation and has demonstrated competence in its use.Competence means that the user:

  1. Logs in before using equipment by entering the time and date, and also indicatesproblems experienced in operation (either in the provided log in sheets or by using Badger).
  2. Can operate equipment safely without supervision.
  3. Knows what to do in case of an emergency.
  4. Knows how to clean up and how to leave the equipment when he/she is finished(default settings for switches, etc.).
  5. Reads and understands the "how to" or “Safe Operating Procedures”card posted on equipment.

1.5Broken Equipment

When equipment fails to operate properly, whether through natural causes or improperuse, the current user will IMMEDIATELY notify the person responsible for the equipmentand/or the lab supervisor or the supervising staff member, then either repair it him/herself if it’s a simple fix and if competent to do so, orwork out a way to repair it with the person responsible. If it's impossible to reach theresponsible person or the lab supervisor, the equipment must be plainly signedindicating that it is temporarily inoperative (or by emailing the user list and posting a Problem or Shutdown on Badger) and messages should be left for earlynotification of the responsible individuals.

When to Shutdown a broken tool on Badger:

  1. If the issue is dangerous to lab users.
  2. If the issue is dangerous to the tool.
  3. The tool is doing something that could ruin user’s samples.
  4. Something is so wrong that no one should use the machine.

When to enter a Problem on Badger:

  1. Some aspect is not working correctly, but some users may be able to use other aspects without a problem.
  2. The tool is working, but not in the normal way and this could affect the results users see on their samples.

Important note: It should be understood that research advisors shall pay for repairs ofany equipment broken by a member of his/her group if the damage is due to improperor careless usage. In shared negligence, there will be a fractional analysis ofresponsibility and the cost will be split accordingly.

1.6 Gowning Procedure

Class 100 Gowning Procedure for the Flexible Cleanroom

  1. Leave your belongings in a locker and keep the key in your pocket.
  2. Before entering the gowning room, please make sure there is no mud, grass, or sandon your shoes. If your shoes are messed up, please leave your shoes in a locker. Do nottake any paper, pencils, cardboard, food, wood, etc. into the cleanroom (cleanroompaper is okay).
  3. Use air hose by door to dust off anything you need to carry into the lab,including laptop computers.
  4. Enter the gowning room and step onto the sticky mat. Get a pair of the “FirstBooties”. Take your pick of whichever style light blue bootie fits over your shoes.You can sit down on the bench while you put your “first booties” on.Your street shoes should only touch the first sticky mat and the floor just in front of thefirst bench. Do not step onto the dirty sticky mat with your “First Booties”.
  5. Walk around the bench and put on a hood or a hat. The hood is recommended if youare doing lithography or anything critical. The hats are okay for most other things andmuch cooler to wear. Tuck all of your hair into the hat.
  6. Put on your Tyvek coverall (write your name on your jumpsuit so you can wear it multipletimes). If you have a hood on, the jumpsuit should go over the base of the hood.
  7. Put on either the medium or large white Tyvek booties and tie the ankles. There are newbooties in bins on the shelf, but we can re‐use booties several times if they’re in decentcondition. The used booties will be in the shelves under the other bench (against therear wall). Sit down on the other bench (the bench against the wall) while you tie yourbooties.
  8. Put on your gloves from the glove bins near the door to the lab.
  9. Use your knuckles or elbow to turn the door handle and enter the lab.
  10. If you are going to be working around any chemicals, put on a pair of safety glassesand/or a safety face shield. The safety glasses are in a rack on the wall just inside of thecleanroom.
  11. Use the pass‐through if you need to carry any stuff into the lab or if you need to passsomething to someone in the lab without gowning up.

Note: Do not step on the sticky mat that leads into the lab from the gowning roomunless you already have the white (second pair) booties on. And once you have yourwhite booties on, do not step on the dirty sticky mat by the gowning room entrance.

Procedure for Un‐Gowning and Leaving the Flexible Cleanroom

  1. Sit down on the bench where the booties are stored and take off your booties. If they areclean, you can put them in the shelf under that bench to be reused.Keep large bootieson the upper shelf, and medium booties on the lower shelf. If they are dirty or ripped,throw them away.
  2. Take off your coverall and put it on a hanger; your coverall should have your name on it, but if it’s ripped or ruined, throw it in the garbage. The coveralls are organizedalphabetically by last name. Please write your full name on the back of your coveralls. You can save your hood or hat for reuse by hanging it on the lower bar of the hanger inside your coverall.
  3. Move to the other bench, and remove your blue “firstbooties” BEFORE stepping on the dirty sticky mat. If they are pretty clean still, savethem for reuse in the bin under that bench. If they are dirty, throw them away. Please do not turn your booties inside-out, otherwise the next person will have them dirty side out.
  4. Exit the lab.

Note: please make sure you have picked up everything. Don’t leavebooties, hats, etc. on the floor. If any garbage like dirt clods falls out of your bootiesonto the floor, please use the cleanroom vacuum to clean up the mess.