Instrument images / /
/ / /
Magnification / x20 to x100,000 / ü
Free scale Magnification / ü / X80,000 max / X15 to x300,000 / ü / ü
Resolution / Size / Size
3.0nm (30kV, SE Image)
10.0nm (3kV, SE image) / ü / ü
Detector / SE / ü / ü / ü / SE / ü / ü
BSE Optional / Back Scattered Electron Image / Impossible / ü / ü / Back Scattered Electron Image / ü / ü
High Voltage / 1kV to 30kV 1kV/3kV/5kV/10kV/15kV/20kV/30kV / ü / ü / 20kV max / 1kV to 30kV / ü / ü
EDS / EDS Integrated / ü / EDS Integrated
EDS Optional / Energy dispersive spectroscopy / ü / ü / ü / ü
WDS Optional / Wavelength dispersive Spectroscopy / Wavelength dispersive Spectroscopy / ü / ü
Electron Gun / Tungsten Filament Cartridge / ü / ü / ü / Tungsten Filament Cartridge / ü / ü
Stage Movement / Stage Movement of X axis: 35mm, Y axis: 35mm, Tilt 0~45o
Manual Movement of Z axis: 0~50mm,
Beam Rotation: 360° / Auto Stage Movement of X axis: 35mm, Y axis: 35mm,
Tilt: 0~45o
Manual Movement of Z axis: 0~50mm
Beam Rotation: 360° / Auto Stage Movement of X axis: 35mm,
Y axis: 35mm,
Manual Movement of Z axis: 0~50mm,
Beam Rotation: 360° / 5 Axis Stage:
Movement of X axis: 40mm, Y axis: 65mm, Z axis: 5~60mm,
Tilt: -20°~90°, Rotation: 360° / ü / Differences
Y axis stage 60mm
Z axis: 0~60mm,
Image Shift / ±50㎛ [WD: 10mm] / ü / ü / ü / ±50㎛ [WD: 10mm] / ü / ü
Automatic Stage / Auto Stage Movement
X (35mm), Y (35mm), T (0 ~ 45°) / Manual Stage Movement R (360°), Z (5 ~ 50mm) / Manual Stage Movement R (360°), Z (5 ~ 50mm) / Manual Movement of Z axis: 0~50mm,
Beam Rotation: 360° / Auto Stage Movement of 5 axis, XYZ, Tx, TY / ü
Max Sample Size / Max sample size 70mm dia. / ü / ü / ü / Max sample size 210mm dia. / ü / ü
Measurement Mode / RED(High Speed) 320x480
TV(Low Speed) 800x600
Photo 1 1280x960
Photo 2 2560x1920
Photo 3 5120x3840 / ü / ü / ü / RED(High Speed) 320x240
TV(Low Speed) 800x600 pixels
Photo 1 1280x960
Photo 2 2560x1920
Photo 3 5120x3840 / ü / ü
Auto Functions / Filament, Focus, Contrast Brightness / ü / ü / ü / Filament, Focus, Contrast Brightness / ü / ü
Storage Format / BMP, JPG, PNG, TIFF / ü / ü / ü / BMP, JPG, PNG, TIFF / ü / ü
Service / Operating ACST Team / ü / ü / ü / Operating ACST Team / ü / ü
Maintenance Cost / Maintenance of Long-term Use / ü / ü / ü / Maintenance of Long-term Use / ü / ü
Vacuum System / Turbo molecular pump [80 liters/sec]
- Max. Effect of vacuum 10-5 torr
Rotary pump [100 liters/sec]
- Max. Effect of vacuum 10-2 torr / ü / ü / ü / Turbo molecular pump [210 liters/sec]
- Max. Effect of vacuum 10-5 torr
Rotary pump [100 liters/sec]
- Max. Effect of vacuum 10-2 torr / ü / ü
Ion Coater Optional / Yes / ü / ü / ü / ü / ü
Suggested Retail Base price USD / $124,000.00 / $74,000.00 / $72,000.00 / $99,000.00 / $90,000.00
-Standard Features - Optional Features - Features not included or Limitations