Background Statement for SEMI Draft Document 6114

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Background Statement for SEMI Draft Document 6114

LINE ITEM REVISION TO SEMI E5-0813

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)

NOTICE: This Background Statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this ballot.

NOTICE: For each Reject Vote, the Voter shall provide text or other supportive material indicating the reason(s) for disapproval (i.e., Negative[s]), referenced to the applicable section(s) and/or paragraph(s), to accompany the vote.

NOTICE: Recipients of this ballot are invited to submit, with their Comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, ‘patented technology’ is defined as technology for which a patent has been issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

According to the SEMI Standards Procedure Manual, a Line-Item Ballot should include the Purpose, Scope, Limitations (if present), and Terminology (if present) sections, along with the full text of any section to which revisions are being balloted.

Background

One of the common features of a GEM interface is the transfer of recipes (process programs) to and from the equipment. There are several ways to implement Process Recipe Management:

Unformatted Process Programs allow the transfer of a recipe as a single data item PPBODY within a single messages S7F3 (Process Program Send) or S7F6 (Process Program Data). When the PPBODY is specified as a single data item, then the recipe is limited to a size about 16.7 MB (assuming HSMS communication). In order to allow the transfer of recipes larger than 16.7 MB, E5 and E30 include message scenarios for “Large Process Programs”. Unfortunately, the Large Process Program scenarios are very complicated to implement. For example, here is the GEM scenario for a Host Initiated Large Process Program Upload:

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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This proposal includes new messages for uploading and downloading recipes in a single message. By transferring the entire recipe in a single message, it is much easier to implement both for the host and the equipment.

This proposal, although specifically targeting recipe transfer between a host and equipment, is not limited to recipes. The messages incorporate a generic “ITEMTYPE” field to allow for transfer of other items that are not recipes. For example, new standards like E170 could adopt these new messages and use an ITEMTYPE “PRODUCTIONRECIPE” to distinguish its production recipe transfer from non-production recipe transfers. A Supplier may specify a custom ITEMTYPE to transfer other files types not currently specified by a standard (like Wafer Map or large analysis data)

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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SEMI

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Milpitas, CA 95035-5446

Phone: 408.943.6900

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This proposal also includes a generic “ERRTEXT” which allows the reply message to include an informative error message when there is an error, with a generous 1024-character limit. This is distinctly more useful than a mere acknowledgment error code.

This ballot does not specify the stream number. Instead, it says SXX in this ballot, where SEMI staff will replace the “XX” with the designated stream. Most likely, it will be stream 20 or 21.

All of the changes are proposed in a single line item.

Note that text to be added are shown in underlined blue text. Deleted items are shown in strikethrough red text.

What is the problem being solved?

Simplify the transfer of recipes larger than 16.7 MB. Allow a single message to contain the entire recipe. Over time, the number of equipment with recipes larger than 16.7 MB is expected to increase. Also allow other large items to be transferred.

What is the history of this issue and ballot?

. This is the first ballot for this.

Who will this affect?How?Why?

This might affect any equipment supplier that has unformatted process program recipes sometimes larger than 16.7 MB and do not want to support the complicated large unformatted process program transfers. Additional, any factories that use equipment that implement these new messages would also be affected.

Is this a change to an existing solution, or, is it a new activity?

These are new features to an existing Specification.

Revision Control

This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force.

Review and Adjudication Information

Meeting details are subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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SEMI

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Milpitas, CA 95035-5446

Phone: 408.943.6900

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SEMI Draft Document 6114

LINE ITEM REVISION TO SEMI E5-0813

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)

1 Line Item #1

1.1 Add new data items to the Data Item Dictionary and a new Stream with Functions (SECS-II messages) to improve the transfer of recipes (and other items) larger than 16.7 MB

1.1.1 Proposal

Add the following new data items to Table 3 Data Item Dictionary in section 9.6. The items will be inserted alphabetically to the table. Text in blue and underlined are new text in the specification.

1.1.2 Proposal

Add the following new Stream and related SECS-II messages in the appropriate location as determined by SEMI staff at the end of section 10. “YY” will be replaced by the actual section number; most likely “20” or “21”.

10.YY Stream XX Item Transfer

10.YY.1 Description

This section defines messages for transferring items between a host and equipment. This includes but is not limited to the transfer of recipes when ITEMTYPE is “SEMI:RECIPE”. When transferring large items which cannot be stored in a single data item, the item is split into smaller parts. The receiver can concatenate the parts back into a single item. By splitting the item into smaller parts, these messages allow much larger items to be transferred in a single message and my simple means.

<End of Ballot>

The rest of this document is material that is called out in the procedure guide as part of a ballot,

but is not part of the balloted change.

NOTICE: Per ¶ 3.4.3.3.1 of the SEMI Standards Procedure Guide, the purpose, scope, limitations, and terminology

sections are included.

SEMI E5-0813

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)

This Standard was technically approved by the Information & ControlGlobal Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at and in August 2013.Originally published in 1982; previously published July 2012.

1 Purpose

1.1 The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

1.1.1 It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained in §6.

1.1.2 It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.

1.1.3 The messages defined in the Standard support the most typical activities required for IC manufacturing. The Standard also provides for the definition of equipment-specific messages to support those activities not covered by the standard messages. While certain activities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment.

2 Scope

2.1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I.

2.1.1 SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity.

2.1.2 SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message.

2.1.3 The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.

NOTICE:SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 SECS-II applies to equipment and hosts used in the manufacturing of semiconductor devices. Examples of the activities supported by the Standard are: transfer of control programs, material movement information, measurement data, summarized test data, and alarms.

3.1.1 The minimum compliance to this Standard involves meeting the few constraints outlined in §8. It is expected that a given piece of equipment will require only a subset of the functions described in this Standard. The number of functions and the selection of functions will depend upon the equipment capabilities and requirements. For each piece of equipment, the exact format for each function provided must be documented according to the form outlined in §10.

3.1.2 It is assumed that the equipment will define the messages used in a particular implementation of SECS-II. It is assumed the host will support equipment implementation.

4 Referenced Standards and Documents

4.1 SEMI Standards and Safety Guidelines

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)