Background Statement for SEMI Draft Document 5828
Line-item Revision to:
SEMI E170-0215: SPPECIFICATION FOR PRODUCTION RECIPE CACHE (PRC)
SEMI E170.1-0215: SPECIFICATION FOR SECS-II PROTOCOL FOR PRODUCTION RECIPE CACHE
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, ‘patented technology’ is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.
Background
Through implementation studies, the following revisions are proposed.
1. Line-item #1: Introduce Secured Recipe Space and revise messages
· Motivations
Ø Current messages defined by E170/E170.1-0215 can only support PRC Space, and cannot access the recipes in Conventional Recipe Space. This also negatively impacts to the flexible use of VersionID in Conventional Recipe Space.
Ø Simplify the specification by eliminating the functions which became unnecessary through SRS introduction studies.
· Actions
Ø Introduce Secured Recipe Space Object to section 8 and revise messages so that they can support both Conventional Recipe Space and PRC.
² Move recipe handling message definitions from PRC Object to SRS Object to cover both Conventional Recipe Space and PRC.
² Eliminate entire ‘Section 10 Production Execution Mode (PEM) State Management Job’ and make it an attribute of SRS Object.
² Rename UniqueID to VersionID as it is unique only under particular RecipeID
Ø Simplify PRC Object definitions
² Eliminate RUGNumber as user group management for PRC will be done implicitly by the host
² Eliminate ClassInfo as the linkage information embedded in current implementations will be used
² Eliminate ‘PRC Function’ description section and merge it into ‘PRC Operation’
² Eliminate state models to eliminate unnecessary events and make document simple
· Impact
Ø Add SecurityID to E170.1 messages to identify whether Conventional Recipe Space or PRC.
Messages / Recipe Space / Comment /Conventional Recipe Space / PRC Space /
Conventional messages
(E5, E30, E40) / Supported
(existing implementation)
RecipeID = PPID / Not supported / Existing specification
èNo change
Current E170/E170.1 / Not supported / Supported
List of ID
ID= RecipeID (PPID) + UniqueID / èRevise to be more extendible
èProposed Extended messages by #5828 LI Revisions to E170/E170.1 / Supports
List of RecipeXID
RecipeXID =
RecipeID (PPID) +
VersionID (= ‘’) +
SecurityID (= ‘Conventional’) / Supports
List of RecipeXID
RecipeXID =
RecipeID (PPID) +
VersionID +
SecurityID (= ‘Cache’) / Same new message set with RecipeXID and List capability supports both CRS and PRC
Note: UniqueID is renamed as VersionID in alignment with #5618A
Comment / Both conventional and extended messages will be usable for conventional use
2. Line-item #2: Expression improvements
· Motivation
Ø Some expressions which need to be improved are found.
· Action
Ø Replace ‘MES / Recipe Server’ in Figure 4 to ‘Host (MES / Recipe Server)’.
Ø Align compliance table with the main text.
· Impact
Ø Expression change only.
3. Line-item #3: Clarify MaxNumber and MaxTime
· Motivation
Ø Need more clarifications of the definitions of MaxNumber and MaxTime
· Actions
Ø Add explanation on the list structure of MaxNumber
Ø Add explanation that MaxTime is not a timing but a duration
Ø Add default definitions to MaxNumber and MaxTime
· Impact
Ø Default specifications are added
4. Line-item #4: Change APPENDIX 1 to related information
· Motivation
Ø Change APPENDIX1 to related information so that committee can improve it timelier.
· Actions
Ø Reform APPENDIX1 as related information per SEMI style guide keeping the content same.
· Impact
Ø None.
Note in the proposals, line items are distinguished by colors. The start point of a line item is marked with the line item number as <#n>, and the end point of a line item is marked with the line item number as </#n>. The added text is typically highlighted with underline. Removed text is typically denoted with double strikeout marks (on the bottom for figure). Deleted figure is denoted with <#n>çDelete</#n>, added figure is denoted with <#n>çAdd</#n> (may be nested in the tags with the same number). These markings are for highlight in the ballot only. They are not proposed to be included in the updated standard. Where the proposals show text extracted from the existing standard, any references in the text are aligned with current section numbering. However, recognize that various proposals may add or remove sections, requiring adjustment of references. This ballot assumes that SEMI will adjust these references prior to publication.
Revision Control
This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force.
Date / Version / Name / EditsReview and Adjudication Information
Task Force Review / Committee AdjudicationGroup: / Japan GEM 300 TF / Japan TC Chapter of Global Information & Control Technical Committee
Date: / Wednesday, April 22, 2015 / Thursday, April 23, 2015
Time & Time Zone: / 10:00-17:00 [JST] / 13:30-17:00 [JST]
Location: / SEMI Japan, Ichigaya office / SEMI Japan, Ichigaya office
City, State/Country: / Tokyo, Japan / Tokyo, Japan
Leader(s): / Yoshihisa Takasaki (SCREEN Semiconductor Solutions Co., Ltd)
Yuko Toyoshima (Hitachi High-Technologies) / Takayuki Nishimura (SCREEN Semiconductor Solutions Co., Ltd)
Mitsuhiro Matsuda (Hitachi Kokusai Electric Inc.)
Standards Staff: / Chie Yanagisawa (SEMI Japan)
81.3.3222.5863 / / Chie Yanagisawa (SEMI Japan)
81.3.3222.5863 /
Task Force Review meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.
This line-item ballot includes the purpose, scope, limitations and terminology sections per SEMI Standards Procedure Guide.
If you need a copy of the documents in order to cast a vote, please contact the following person within SEMI.
Chie Yanagisawa
SEMI Standards, SEMI Japan
Tel: 81.3.3222.5863
Email:
Please be advised that voter requests for access to the full Standard must be made at least three business days before the voting deadline. Late requests may not be honored, and if the Standard is not available for this reason, the voter may not use this as justification for rejecting the ballot.
4
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5423
SEMI Draft Document 5828
Line-item Revision to:
SEMI E170-0215: Specification for Production Recipe Cache (PRC)
SEMI E170.1-0215: SPECIFICATION FOR SECS-II PROTOCOL FOR PRODCUTION RECIPE CACHE
Make following line item revisions to the specified part of SEMI E170-0215.
Note that, for simplicity, the section numbers in the quotation of SEMI E170-0215 in this ballot are used for explanations unless otherwise noted.
Line Item #1: Introduce Secured Recipe Space and revise messages
Ø In addition to the noted revisions, merge section 9 ‘PRC Operational Requirements’ and section 11 ‘PRC Object Requirements’ of E170, and rename as ‘PRC Requirements’. And, align and renumber the contents of Table 55 ‘PRC Compliance Statement’ according to this revision. Note: This revision is not shown in the quoted section of this document to avoid busy renumbering.
Line Item #2: Expression improvements
Line Item #3: Clarify MaxNumber and MaxTime
Line Item #4: Change APPENDIX 1 of E170 to related information
Ø Reform APPENDIX1 as related information per SEMI style guide keeping the content same.
Ø Note: This revision is not shown in the quoted part of this ballot
Note in the proposals, line items are distinguished by colors. The start point of a line item is marked with the line item number as <#n>, and the end point of a line item is marked with the line item number as </#n>. The added text or figure is typically highlighted with underline. Removed text or figure is typically denoted with double strikeout marks (on the bottom for figure). In addition, for better visibility, deleted figure is denoted with <#n>çDelete</#n>, added figure is denoted with <#n>çAdd</#n> (may be nested in the tags with the same number). These markings are for highlight in the ballot only. They are not proposed to be included in the updated standard. Where the proposals show text extracted from the existing standard, any references in the text are aligned with current section numbering. However, recognize that various proposals may add or remove sections, requiring adjustment of references. This ballot assumes that SEMI will adjust these references prior to publication.
Quotation from SEMI E170-0215: SPECIFICATION FOR PRODUCTION RECIPE CACHE (PRC)
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 10, 2015. Available at www.semiviews.org and www.semi.org in February 2015.
1 Purpose
1.1 The purpose of this Standard is to provide a standardized recipe transfer and storage mechanism from Recipe Server to equipment, which is used for semiconductor manufacturing systems or similar ones, where the management of the master copies of the recipes for mass-production is centralized on the Recipe Server.
1.2 The purpose of this Standard is to provide a standardized mechanism to transfer production recipes from Recipe Server to equipment, and to store the recipes securely in the equipment, so that the recipes in the equipment are exact subset copies of the recipes in the Recipe Server and are protected from non-authorized access, in a factory in which the master copies of production recipes are managed on the Recipe Server.
1.3 The purpose of this Standard is to provide a recipe transfer and storage mechanism which provides the following benefits.
· Protection of the recipes in equipment from non-privileged access by defining a protected recipe space and Recipe User Group management capability
· Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism
· Reduction of operator efforts to download recipes that are used for production from Recipe Server to equipment by providing an automatic transfer mechanism
· Reduction of operator effort required to maintain consistency of recipes in equipment with recipes in Recipe Server by providing an automated consistency maintenance mechanism
· Reduction of communication and computation overhead and cost due to recipe download related transactions by adopting Cache Mode operation
1.4 The purpose of this Standard is to provide a recipe transfer and storage mechanism which is compatible with current practices in the following aspects for easier deployment.
· Recipe identification and uniqueness control
· Recipe linkage
· Variable Parameter management
· Recipe operations except for production execution
· Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)
· Conventional recipe download modes such as Pre-Download Mode or Full Download Mode
2 Scope
2.1 This Standard covers a definition and usage of Production Execution Mode (PEM) state which represents the status of equipment, whether the equipment is in use for mass production or not.
2.2 This Standard covers a definition and usage of Recipe User Group for recipe security control.
2.3 This Standard covers a definition of new recipe space named Production Recipe Cache (PRC) in equipment, which is dedicated for host controlled process execution in which recipes shall be synchronized with the host and shall be protected from modification by unauthorized operations.
2.4 This Standard covers definitions of mechanisms and operations which manage PRC so that recipes in PRC are protected from non-privileged access and are consistent with the recipes on the Recipe Server in the host.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 No Message Definition — This Document does not define any messaging. Messaging may be defined in a separate standard.
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3.2 Master Copies on Recipe Server — This Standard has a precondition that the master copies of the recipes that are used for host triggered PJ creation in PEM On state are stored and managed on Recipe Server. This Standard cannot be applied to the factory in which a Recipe Server does not exist.
3.3 Linked Recipe Compatibility — This Standard does not define any requirements for linked recipes but is intended to be compatible with currently implemented recipe linkage schemes by allowing the structure of PRC to be composed as equivalent with the structure of the Conventional Recipe Space.
3.4 Recipe Identification — This Standard does not define any introduces extended recipe identification scheme for new requirements but is intended to be compatible with the existing recipe identification schemes for existing functionalities.
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3.5 Variable Parameters — This Standard does not define any specific requirements for Variable Parameters but is intended to be compatible with the current implementations.
3.6 User Authentication and Access Privilege — This Standard does not define any requirement for user authentication and access privileges but only recommends the use of access control on PRC resources and functions. User authentication and access privilege should be defined separately from this Standard.
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)